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Journal of Information Display Volume 3, 2002 - Issue 2
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Original Articles

Large area plasma for LCD processing by individyally controlled array sources

Bong Joo Kim School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea Phone: +32 860–7768 Fax: +32 860–7768 E-mail: [email protected]
,
Chin‐Woo Kim School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea
,
Se‐Geun Park School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea
,
Jong‐Geun Lee School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea
,
Seungul Lee School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea
,
Ilhang Lee School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea
&
Beom‐Hoan O School of Information & Communication Engineering, Inha University, 253 Younghyun‐Dong, Incheon, 402–751, Korea
 show all
Pages 26-30 | Received 06 Feb 2002, Accepted 22 Mar 2002, Published online: 22 Nov 2010

References

  • Shih , A. , Demos , A. and Beer , R. 1996 . Solid state Technol. , 39 : 71
  • Park , Se‐Geun , Kim , Chul‐ho and O , Beom‐hoan . 1999 . Thin Solid Films , 355–356 : 252
  • Heinrich , F. , Bänziger , U. , Jentzsch , A. , Neumann , G. and Huth , C. 1996 . J. Vac. Sci. Technol. , B14 : 2000
  • Chan , C. U.S. Patent No.5 . 1997 . 638, 811
  • Beom‐hoan , O , Jeong , Jae‐seong and Park , Se‐Geun . 1999 . Surface & Coatings Technol. , 120–121 : 752
  • Park , Se‐Geun , Song , Ho‐Yong and Beom‐hoan , O . 2001 . J. Vac. Sci. Technol. , B 19 : 1841
  • Student Member, KIDS
  • Member, KIDS

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