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Journal of Information Display Volume 11, 2010 - Issue 1
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Original Articles

Effective annealing and crystallization of si film for advanced TFT system

Takashi Noguchi Faculty of Engineering, University of the Ryukyus, 1 Senbaru, Nishihara, Okinawa, 9015–8680, Japan Phone: +81–98–895–8680 Fax: +81–98–895–8680 E-mail: [email protected]‐ryukyu.ac.jp
Pages 12-16 | Received 29 Nov 2009, Accepted 22 Mar 2010, Published online: 22 Nov 2010

References

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