Surface amorphisation of TiZrN coatings by laser carburisation

References

• Boelens S, Veltrop H. Hard coatings of TiN, (TiHf) N and (TiNb) N deposited by random and steered arc evaporation. Surf Coat Tech. 1987;33:63–71. doi: 10.1016/0257-8972(87)90177-0
   Web of Science ®Google Scholar
• Huang HH, He JL, Hon MH. Microstructure and mechanical properties of surface layer obtained by plasma nitriding and/or TiN coating on high speed steel. Surf Coat Tech. 1994;64(1):41–46. doi: 10.1016/S0257-8972(09)90084-6
   Web of Science ®Google Scholar
• Wang Y, Northwood DO. An investigation into TiN-coated 316L stainless steel as a bipolar plate material for PEM fuel cells. J Power Sourc. 2007;165(1):293–298. doi: 10.1016/j.jpowsour.2006.12.034
   Web of Science ®Google Scholar
• Donohue LA, Smith IJ, Münz WD, et al. Microstructure and oxidation-resistance of Ti1− x− y− zAlxCryYzN layers grown by combined steered-arc/unbalanced-magnetron-sputter deposition. Surf Coat Tech. 1997;94–95:226–231. doi: 10.1016/S0257-8972(97)00249-1
   Web of Science ®Google Scholar
• Takaoka H, Nakamura E, Oshika T, et al. Relationship between an affinity of (Ti1−x, Alx)N layer toward iron and its cutting performance. Surf Coat Tech. 2004;177–178:306–311. doi: 10.1016/j.surfcoat.2003.09.009
   Web of Science ®Google Scholar
• Aouadi SM, Wong KC, Mitchell KAR. Characterization of titanium chromium nitride nanocomposite protective coatings. Appl Surf Sci. 2004;229(1):387–394. doi: 10.1016/j.apsusc.2004.02.019
   Web of Science ®Google Scholar
• Knotek O, Löffler F, Krämer G. Performance behaviour of physical-vapour-deposition-coated cermets in interrupted-cut machining. Surf Coat Tech. 1993;62(1–3):669–673. doi: 10.1016/0257-8972(93)90316-G
   Web of Science ®Google Scholar
• Yan P, Deng J, Wu Z, et al. Friction and wear behavior of the PVD (Zr,Ti)N coated cemented carbide against 40Cr hardened steel. Int J Refract Met H. 2012;35:213–220. doi: 10.1016/j.ijrmhm.2012.06.003
   Web of Science ®Google Scholar
• Abadias G, Guerin P.In situ stress evolution during magnetron sputtering of transition metal nitride thin films. Appl Phys Lett. 2008;93(11):111908. doi: 10.1063/1.2985814
   Web of Science ®Google Scholar
• Abadias G, Koutsokeras LE, Siozios A, et al. Stress, phase stability and oxidation resistance of ternary Ti–Me–N (Me=Zr, Ta) hard coatings. Thin Solid Films. 2013;538:56–70. doi: 10.1016/j.tsf.2012.10.119
   Web of Science ®Google Scholar
• Marcinauskas L, Černauskas M, Milieška M, et al. The effect of hydrogen addition in argon-acetylene plasma on the structure of amorphous carbon films. J Non-Cryst Solids. 2017;466–467:1–7. doi: 10.1016/j.jnoncrysol.2017.03.021
   Web of Science ®Google Scholar
• Zhou S, Liu L, Ma L. Study on structure, mechanical and tribological properties of iron incorporated diamond-like carbon films. J Non-Cryst Solids. 2017;455:35–41. doi: 10.1016/j.jnoncrysol.2016.10.018
   Web of Science ®Google Scholar
• Bhushan B. Chemical, mechanical and tribological characterization of ultra-thin and hard amorphous carbon coatings as thin as 3.5 nm: recent developments. Diam Relat Mater. 1999;8(11):1985–2015. doi: 10.1016/S0925-9635(99)00158-2
   Web of Science ®Google Scholar
• Robertson J. Diamond-like amorphous carbon. Mat Sci Eng R. 2002;37(4):129–281. doi: 10.1016/S0927-796X(02)00005-0
   Web of Science ®Google Scholar
• Vepřek S, Haussmann M, Reiprich S. Superhard nanocrystalline W2N/amorphous Si3N4 composite materials. J Vac Sci Technol A. 1996;14(1):46–51. doi: 10.1116/1.579878
   Web of Science ®Google Scholar
• Rybachuk M, Bell JM. The effect of sp2 fraction and bonding disorder on micro-mechanical and electronic properties of a-C: H films. Thin Solid Films. 2007;515(20):7855–7860. doi: 10.1016/j.tsf.2007.04.040
   Web of Science ®Google Scholar
• Milne WI. Tetrahedrally bonded amorphous carbon. J Non-Cryst Solids. 1996;198–200:605–610. doi: 10.1016/0022-3093(95)00773-3
   Web of Science ®Google Scholar
• Tian BM, Yuan ZH, Hui W. Formation and coalescence of linear chains in growth of nanostructured sp-sp2 amorphous carbon films. Chem Phys Lett. 2008;462(1):104–108.
   Web of Science ®Google Scholar
• Voevodin AA, Prasad SV, Zabinski JS. Nanocrystalline carbide/amorphous carbon composites. J Appl Phys. 1997;82(2):855–858. doi: 10.1063/1.365784
   Web of Science ®Google Scholar
• Matthews A, Leyland A, Holmberg K, et al. Design aspects for advanced tribological surface coatings. Surf Coat Tech. 1998;100–101:1–6. doi: 10.1016/S0257-8972(97)00578-1
   Web of Science ®Google Scholar
• Barshilia HC, Prakash MS, Rao DVS, et al. Superhard nanocomposite coatings of TiN/a-C prepared by reactive DC magnetron sputtering. Surf Coat Tech. 2005;195(2):147–153. doi: 10.1016/j.surfcoat.2004.09.035
   Web of Science ®Google Scholar
• Zheng XH, Tu JP, Gu B, et al. Preparation and tribological behavior of TiN/a-C composite films deposited by DC magnetron sputtering. Wear. 2008;265(1):261–265. doi: 10.1016/j.wear.2007.10.007
   Web of Science ®Google Scholar
• Sedira S, Achour S, Avci A, et al. Physical deposition of carbon doped titanium nitride film by DC magnetron sputtering for metallic implant coating use. Appl Surf Sci. 2014;295:81–85. doi: 10.1016/j.apsusc.2014.01.010
   Web of Science ®Google Scholar
• Nakamura I, Sasaki M, Takano I, et al. Mechanical properties of carbon-doped TIN films by ion beam irradiation in ethylene gas atmosphere. Surf Coat Tech. 2005;196(1):104–107. doi: 10.1016/j.surfcoat.2004.08.113
   Web of Science ®Google Scholar
• Polychronopoulou K, Rebholz C, Baker MA, et al. Nanostructure, mechanical and tribological properties of reactive magnetron sputtered TiCx coatings. Diam Relat Mater. 2008;17(12):2054–2061. doi: 10.1016/j.diamond.2008.07.007
   Web of Science ®Google Scholar
• Chen S, Wang J, Wang H. Synthesis, characterization and pyrolysis of a high zirconium content zirconocene–polycarbosilane precursor without Zr–O bond. Mater Design. 2016;90:84–90. doi: 10.1016/j.matdes.2015.10.019
   Web of Science ®Google Scholar
• Yoshida M, Tanaka T, Watanabe S, et al. Improvement of oxygen barrier of PET film with diamond-like carbon film by plasma-source ion implantation. Surf Coat Tech. 2003;174–175:1033–1037. doi: 10.1016/S0257-8972(03)00714-X
   Web of Science ®Google Scholar
• Chiu MC, Hsieh WP, Ho WY, et al. Thermal stability of Cr-doped diamond-like carbon films synthesized by cathodic arc evaporation. Thin Solid Films. 2005;476(2):258–263. doi: 10.1016/j.tsf.2004.09.029
   Web of Science ®Google Scholar
• D’anna E, De GML, Luches A, et al. Study of C-N binding states in carbon nitride films deposited by reactive XeCl laser ablation. Thin Solid Films. 1999;347(1):72–77. doi: 10.1016/S0040-6090(98)01734-9
   Web of Science ®Google Scholar
• Ech-Chamikh E, Essafti A, ljdiyaou Y, et al. XPS study of amorphous carbon nitride (a-C: N) thin films deposited by reactive RF sputtering. Sol Energ Mat Sol C. 2006;90(10):1420–1423. doi: 10.1016/j.solmat.2005.10.007
   Web of Science ®Google Scholar
• Jung I, Ha CS, Cho Y, et al. Solvent-Induced surface structure of poly(vinylidene fluoride)/biodegradable polyester blend films. Mol Cryst Liq Cryst. 2014;598(1):23–27. doi: 10.1080/15421406.2014.932676
   Web of Science ®Google Scholar
• Tsuchitani S, Kaneko R, Hirono S. Annealing-induced modification of superhard conductive carbon film. Jpn J Appl Phys. 2006;45(9A):7036–7043. doi: 10.1143/JJAP.45.7036
   Web of Science ®Google Scholar
• Díaz J, Paolicelli G, Ferrer S, et al. Separation of the sp3 and sp2 components in the C1s photoemission spectra of amorphous carbon films. Phy Rev B. 1996;54(11):8064–8069. doi: 10.1103/PhysRevB.54.8064
   Web of Science ®Google Scholar
• Rey S, Antoni F, Prevot B, et al. Thermal stability of amorphous carbon films deposited by pulsed laser ablation. Appl Phys A-Mat. 2000;71(4):433–439. doi: 10.1007/s003390000618
   Web of Science ®Google Scholar