pH-dependent adsorption of Au nanoparticles on chemically modified Si₃N₄ MEMS devices

References

• Maboudian , R . 1998 . Surface processes in MEMS technology . Surf. Sci. Rep. , 30 : 207 – 269 .
   Web of Science ®Google Scholar
• Liew , LA , Saravanan , RA , Bright , VM , Dunn , ML , Daily , JW and Raj , R . 2003 . Processing and characterization of silicon carbon-nitride ceramics: application of electrical properties towards MEMS thermal actuators . Sens. Actu. A , 103 : 171 – 181 .
   Google Scholar
• Wang , W , Tatic-Lucic , S , Brown , WL and Vinci , R . 2008 . Design of a bidirectional MEMS actuator with high displacement resolution, large driving force and power-free latching . Microelec. Eng. , 85 : 587 – 598 .
   Google Scholar
• Boonliang , B , Prewett , PD , Hedley , J , Preece , J and Hamlett , CA . 2008 . A focused-ion-beam micro-paddle resonator for mass detection . J. Micromech. Microeng. , 18 : 015021 (4 pp)
   Google Scholar
• Choi , NJ , Lee , YS , Kwak , JH , Park , JS , Park , KB , Shin , KS , Park , HD , Kim , JC , Huh , JS and Lee , DD . 2005 . Chemical warfare agent sensor using MEMS structure and thick film fabrication method . Sens. Actu. B , 108 : 177 – 183 .
   Google Scholar
• Chun , DW , Hwang , KS , Eom , K , Lee , JH , Cha , BH , Lee , WY , Yoon , DS and Kim , TS . 2007 . Detection of the Au thin-layer in the Hz per picogram regime based on the microcantilevers . Sens. Actu. A , 135 : 857 – 862 .
   Google Scholar
• Goeders , KM , Colton , JS and Bottomley , LA . 2008 . Microcantilevers: sensing chemical interactions via mechanical motion . Chem. Rev. , 108 : 522 – 542 .
   PubMed Web of Science ®Google Scholar
• Gong , JW , Chen , QF , Fei , WF and Seal , S . 2004 . Micromachined nanocrystalline SnO2 chemical gas sensors for electronic nose . Sens. Actu. B , 102 : 117 – 125 .
   Web of Science ®Google Scholar
• Hauptmann , PR . 2006 . Selected examples of intelligent (micro) sensor systems: state-of-the-art and tendencies . Meas. Sci. & Tech. , 17 : 459 – 466 .
   Google Scholar
• Lavrik , NV , Sepaniak , MJ and Datskos , PG . 2004 . Cantilever transducers as a platform for chemical and biological sensors . Rev. Sci. Instrum. , 75 : 2229 – 2253 .
   Web of Science ®Google Scholar
• Li , P and Li , XX . 2006 . A single-sided micromachined piezoresistive SiO2 cantilever sensor for ultra-sensitive detection of gaseous chemicals . J. Micromech. Microeng. , 16 : 2539 – 2546 .
   Google Scholar
• Meier , DC , Evju , JK , Boger , Z , Raman , B , Benkstein , KD , Martinez , CJ , Montgomery , CB and Semancik , S . 2007 . The potential for and challenges of detecting chemical hazards with temperature-programmed microsensors . Sens. Actu. B , 121 : 282 – 294 .
   Google Scholar
• Mlsna , TE , Cemalovic , S , Warburton , M , Hobson , ST , Mlsna , DA and Patel , SV . 2006 . Chemicapacitive microsensors for chemical warfare agent and toxic industrial chemical detection . Sens. Actu. B , 116 : 192 – 201 .
   Google Scholar
• Zhou , W , Khaliq , A , Tang , YJ , Ji , HF and Selmic , RR . 2005 . Simulation and design of piezoelectric microcantilever chemical sensors . Sens. Actu. A , 125 : 69 – 75 .
   Google Scholar
• Li , YC , Ho , MH , Hung , SJ , Chen , MH and Lu , MSC . 2006 . CMOS micromachined capacitive cantilevers for mass sensing . J. Micromech. Microeng. , 16 : 2659 – 2665 .
   Google Scholar
• Lazcka , O , Campo , FJD and Munoz , FX . 2007 . Pathogen detection: a perspective of traditional methods and biosensors . Biosens. Bioelec. , 22 : 1205 – 1217 .
   PubMed Web of Science ®Google Scholar
• O'Sullivan , CK and Guilbault , GG . 1999 . Commercial quartz crystal microbalances - theory and applications . Biosens. Bioelec. , 14 : 663 – 670 .
   Web of Science ®Google Scholar
• Dorozhkin , LM and Rozanov , IA . 2001 . Acoustic wave chemical sensors for gases . J. Anal. Chem. , 56 : 399 – 416 .
   Google Scholar
• Smith , JP and Hinson-Smith , V . 2006 . The new era of SAW devices . Anal. Chem. , 78 : 3505 – 3507 .
   Google Scholar
• Zhu , T , Fu , X , Mu , T , Wang , J and Liu , Z . 1999 . pH-Dependent adsorption of gold nanoparticles on p-aminothiophenol-modified gold substrates . Langmuir , 15 : 5197 – 5199 .
   Web of Science ®Google Scholar
• Diegoli , S , Mendes , PM , Baguley , ER , Leigh , SJ , Iqbal , P , Garcia Diaz , YR , Begum , S , Critchley , K , Hammond , GD , Evans , SD , Attwood , D , Jones , IP and Preece , JA . 2006 . pH-Dependant gold nanoparticle self-organization on functionalised Si/SiO2 surfaces . J. Exp. Nanosci. , 1 : 333 – 353 .
   Web of Science ®Google Scholar
• Hamlett , CAE , Critchley , K , Gorzny , M , Evans , SD , Prewett , PD and Preece , JA . 2008 . Vapour phase formation of amino functionalised Si3N4 surfaces . Surf. Sci. , 602 : 2724 – 2733 .
   Web of Science ®Google Scholar
• Ertas , G , Demirok , UK and Suzer , S . 2005 . Enhanced peak separation in XPS with external biasing . Appl. Surf. Sci. , 249 : 12 – 15 .
   Google Scholar
• Praharaj , S , Panigrahi , S , Basu , S , Pande , S , Jana , S , Ghosh , SK and Pal , T . 2007 . Effect of bromide and chloride ions for the dissolution of colloidal gold . J. Photochem. Photobio. A , 187 : 196 – 201 .
   Google Scholar
• Patai , S . 1968 . The Chemistry of the Amino Group , London, , UK : Interscience Publishers .
   Google Scholar
• Wang , B , Oleschuk , RD and Horton , JH . 2005 . Chemical force titrations of amine- and sulfonic acid-modified poly(dimethylsiloxane) . Langmuir , 21 : 1290 – 1298 .
   Google Scholar
• Atkins , PW . 1998 . Physical Chemistry , 6th , Oxford, , UK : Oxford University Press .
   Google Scholar
• Frens , G . 1973 . Controlled nucleation for the regulation of the particle size in monodisperse gold suspensions . Nat. Phys. Sci. , 241 : 20 – 22 .
   Web of Science ®Google Scholar
• Wei , ZQ , Wang , C and Bai , CL . 2000 . Surface imaging of fragile materials with hydrophilic atomic force microscope tips . Surf. Sci. , 467 : 185 – 190 .
   Web of Science ®Google Scholar