A ZnO thin-film driven microcantilever for nanoscale actuation and sensing

References

• Morita , T. 2003 . Miniature piezoelectric motors . Sensor. Actuator: Phys , 103 : 291 – 300 .
   Web of Science ®Google Scholar
• Miyahara , Y. , Deschler , M. , Fujii , T. , Watanabe , S. and Bleuler , H. 2002 . Non-contact atomic force microscope with a PZT cantilever used for deflection sensing, direct oscillation and feedback actuation . Appl. Surf. Sci , 188 : 450 – 455 .
   Web of Science ®Google Scholar
• Kugeler , C. , Hennings , A. , Bottger , U. and Waser , R. 2009 . An integrated microelectromechanical microwave switch based on piezoelectric actuation . J. Electroceram , 22 : 145 – 149 .
   Web of Science ®Google Scholar
• Sinha , N. , Jones , T.S. , Guo , Z.J. and Piazza , G. 2012 . Body-biased complementary logic implemented using AlN piezoelectric MEMS Switches . J. Microelectromech. Syst , 21 : 484 – 496 .
   Web of Science ®Google Scholar
• Tu , W.H. and Chang , K. 2007 . Piezoelectric transducer-controlled dual-mode switchable bandpass filter . IEEE Microw. Wireless Compon. Lett , 17 : 199 – 201 .
   Web of Science ®Google Scholar
• Koh , K.H. , Kobayashi , T. and Lee , C. 2011 . A 2-D MEMS scanning mirror based on dynamic mixed mode excitation of a piezoelectric PZT thin film S-shaped actuator . Optic Express , 19 : 13812 – 13824 .
   PubMed Web of Science ®Google Scholar
• Koh , K.H. , Kobayashi , T. , Hsiao , F.L. and Lee , C. 2010 . Characterization of piezoelectric PZT beam actuators for driving 2D scanning micromirrors . Sensor. Actuator: Phys , 162 : 336 – 347 .
   Web of Science ®Google Scholar
• Zou , Q. , Tan , W. , Kim , E.S. and Loeb , G.E. 2008 . Single-and triaxis piezoelectric-bimorph accelerometers . J. Microelectromech. Syst , 17 : 45 – 57 .
   Web of Science ®Google Scholar
• Lee , C.K. , Itoh , T. and Suga , T. 1996 . Micromachined piezoelectric force sensors based on PZT thin films . IEEE Trans. Ultrason. Ferroelectrics Freq. Contr , 43 : 553 – 559 .
   Web of Science ®Google Scholar
• Mortet , V. , Petersen , R. , Haenen , K. and ’Olieslaeger , M. D . 2006 . Wide range pressure sensor based on a piezoelectric bimorph microcantilever . Appl Phys Lett , 88 : 133511–1 – 133511–3 .
   Web of Science ®Google Scholar
• Trolier-McKinstry , S. and Muralt , P. 2004 . Thin film piezoelectrics for MEMS . J. Electroceram , 12 : 7 – 17 .
   Web of Science ®Google Scholar
• Jaffe , B. , Cook , W.R. and Jaffe , H.L. 1971 . Piezoelectric Ceramics , New York : Academic Press .
   Google Scholar
• Kobayashi , T. , Ichiki , M. , Tsaur , J. and Maeda , R. 2005 . Effect of multi-coating process on the orientation and microstructure of lead zirconate titanate (PZT) thin films derived by chemical solution deposition . Thin Solid Films , 489 : 74 – 78 .
   Web of Science ®Google Scholar
• Polla , D.L. and Francis , L.F. 1998 . Processing and characterization of piezoelectric materials and integration into microelectromechanical systems . Annu. Rev. Mater. Sci , 28 : 563 – 597 .
   Web of Science ®Google Scholar
• Ikeda , T. 1990 . Fundamentals of Piezoelectricity , Oxford : Oxford University Press .
   Google Scholar
• Ozgur , U. , Alivov , Y.I. , Liu , C. , Teke , A. , Reshchikov , M.A. , Dogan , S. , Avrutin , V. , Cho , S.J. and Morkoc , H. 2005 . A comprehensive review of ZnO materials and devices . J. Appl. Phys , 98 : 041301–1 – 041301–103 .
   Web of Science ®Google Scholar
• Xu , T. , Wu , G.Y. , Zhang , G.B. and Hao , Y.L. 2003 . The compatibility of ZnO piezoelectric film with micromachining process . Sensor. Actuator: Phys , 104 : 61 – 67 .
   Web of Science ®Google Scholar
• Fu , Y.Q. , Luo , J.K. , Du , X.Y. , Flewitt , A.J. , Li , Y. , Markx , G.H. , Walton , A.J. and Milne , W.I. 2010 . Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: A review . Sensor. Actuator: Chem , 143 : 606 – 619 .
   Web of Science ®Google Scholar
• Ippolito , S.J. , Kandasamy , S. , Kalantar-zadeh , K. , Wlodarski , W. , Galatsis , K. , Kiriakidis , G. , Katsarakis , N. and Suchea , M. 2005 . Highly sensitive layered ZnO/LiNbO₃ SAW device with InO_x selective layer for NO₂ and H₂ gas sensing, Sensor. Actuator: Chem , 111–112 : 207 – 212 .
   Google Scholar
• Sadek , A.Z. , Wlodarski , W. , Li , Y.X. , Yu , W. , Li , X. , Yu , X. and Kalantar-zadeh , K. 2007 . A ZnO nanorod based layered ZnO/64° YX LiNbO3 SAW hydrogen gas sensor . Thin Solid Films , 515 : 8705 – 8708 .
   Web of Science ®Google Scholar
• Powell , D.A. , Kalantar-zadeh , K. and Wlodarski , W. 2004 . Numerical calculation of SAW sensitivity: Application to ZnO/LiTaO3 transducers . Sensor. Actuator: Phys , 115 : 456 – 461 .
   Web of Science ®Google Scholar
• Blom , F.R. , Yntema , D.J. , Vandepol , F.C.M. , Elwenspoek , M. , Fluitman , J.H.J. and Popma , T.J.A. 1990 . Thin-film ZnO as micromechanical actuator at low-frequencies . Sensor. Actuator: Phys , 21 : 226 – 228 .
   Web of Science ®Google Scholar
• Smits , J.G. and Choi , W.S. 1991 . The constituent equations of piezoelectric heterogeneous bimorphs . IEEE Trans. Ultrason. Ferroelectrics Freq. Contr , 38 : 256 – 270 .
   PubMed Web of Science ®Google Scholar
• Smits , J.G. , Dalke , S.I. and Cooney , T.K. 1991 . The constituent equations of piezoelectric bimorphs . Sensor. Actuator: Phys , 28 : 41 – 61 .
   Web of Science ®Google Scholar
• DeVoe , D.L. and Pisano , A.P. 1997 . Modeling and optimal design of piezoelectric cantilever microactuators, J. Microelectromech. Syst , 6 : 266 – 270 .
   Web of Science ®Google Scholar
• Weinberg , M.S. 1999 . Working equations for piezoelectric actuators and sensors . J. Microelectromech. Syst , 8 : 529 – 533 .
   Web of Science ®Google Scholar
• Littrell , R. and Grosh , K. 2012 . Modeling and characterization of cantilever-based MEMS piezoelectric sensors and actuators . J. Microelectromech. Syst , 21 : 406 – 413 .
   Web of Science ®Google Scholar
• Minne , S.C. , Yaralioglu , G. , Manalis , S.R. , Adams , J.D. , Zesch , J. , Atalar , A. and Quate , C.F. 1998 . Automated parallel high-speed atomic force microscopy . Appl. Phys. Lett , 72 : 2340 – 2342 .
   Web of Science ®Google Scholar
• Manalis , S.R. , Minne , S.C. and Quate , C.F. 1996 . Atomic force microscopy for high speed imaging using cantilevers with an integrated actuator and sensor . Appl. Phys. Lett , 68 : 871 – 873 .
   Web of Science ®Google Scholar
• Sulchek , T. , Hsieh , R. , Adams , J.D. , Yaralioglu , G.G. , Minne , S.C. , Quate , C.F. , Cleveland , J.P. , Atalar , A. and Adderton , D.M. 2000 . High-speed tapping mode imaging with active Q control for atomic force microscopy . Appl. Phys. Lett , 76 : 1473 – 1475 .
   Web of Science ®Google Scholar
• Shibata , T. , Unno , K. , Makino , E. , Ito , Y. and Shimada , S. 2002 . Characterization of sputtered ZnO thin film as sensor and actuator for diamond AFM probe . Sensor. Actuator: Phys , 102 : 106 – 113 .
   Web of Science ®Google Scholar
• Hughes , W.L. and Wang , Z.L. 2003 . Nanobelts as nanocantilevers . Appl. Phys. Lett , 82 : 2886 – 2888 .
   Web of Science ®Google Scholar
• Meirovitch , L. 2001 . Fundamentals of Vibrations , Boston : McGraw-Hill .
   Google Scholar
• Gere , J.M. 2004 . Mechanics of Materials, , 6th , Belmont : Brooks/Cole-Thomas Learning .
   Google Scholar
• An American National Standard, IEEE Standard on Piezoelectricity, ANSI/IEEE Standard 176-1987, 1987.
   Google Scholar
• Bentley , J.P. 2005 . Principles of Measurement Systems, , 4th , New York : Pearson Prentice Hall .
   Google Scholar