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MATERIALS ENGINEERING

Microstructure and scratch analysis of aluminium thin films sputtered at varying RF power on stainless steel substrates

ORCID Icon, ORCID Icon, ORCID Icon & | (Reviewing editor)
Article: 1765687 | Received 06 Mar 2019, Accepted 03 May 2020, Published online: 18 May 2020

References

  • Ahmadipour, M., Ayub, S. N., Ain, M. F., & Ahmad, Z. A. (2017). Structural, surface morphology and optical properties of sputter-coated CaCu3Ti4O12thin film: Influence of RF magnetron sputtering power. Materials Science in Semiconductor Processing, 66(March), 157–12. https://doi.org/10.1016/j.mssp.2017.04.019
  • Barron, L. W. (2005). High-reflectance, sputter-deposited aluminum alloy thin films for micro-electro-mechanical systems. Rochester Institute of Technology
  • Chaliampalias, D., Vourlias, G., Pavlidou, E., Stergioudis, G., Skolianos, S., & Chrissafis, K. (2008). High temperature oxidation and corrosion in marine environments of thermal spray deposited coatings. Applied Surface Science, 255(5 Part 2), 3104–3111. https://doi.org/10.1016/j.apsusc.2008.08.101
  • D’Heurle, F. M. (1970). Aluminum films deposited by rf sputtering. Metallurgical and Materials Transactions B, 1(3), 725–732. https://doi.org/10.1007/BF02811600
  • Her, S., & Wang, Y. (2015). Temperature effect on microstructure and mechanical properties of aluminum film deposited on glass substrates. 22(June), 268–272. Indian Journal of Engineering & Materials Sciences. https://doi.org/10.1166/asl.2013.5005
  • Kao, M. T., & Lin, J. F. (2012). Effects of deposition conditions of the Al film in Al/glass specimens and annealing conditions on internal stresses and hillock formations. Thin Solid Films, 520(16), 5353–5360. https://doi.org/10.1016/j.tsf.2011.12.027
  • Khachatryan, H., Lee, S., Kim, K.-B., Kim, H.-K., & Kim, M. (2018, November). Al thin film: The effect of substrate type on Al film formation and morphology. Journal of Physics and Chemistry of Solids, 122(May), 109–117. https://doi.org/10.1016/j.jpcs.2018.06.018
  • Kumar, B. R., & Rao, T. S. (2012). Influence of sputtering power on physical properties of nanostructured zinc aluminum oxide thin films for photovoltaic applications. Digest Journal of Nanomaterials and Biostructures, 7(3), 1051–1061.
  • Lee, H.-S., Singh, J., Ismail, M., & Bhattacharya, C. (2016). Corrosion resistance properties of aluminum coating applied by arc thermal metal spray in SAE J2334 solution with exposure periods. Metals (Basel), 6(3), 55. https://doi.org/10.3390/met6030055
  • Lugolole, R., & Obwoya, S. K. (2015). The effect of thickness of aluminium films on optical reflectance. Journal of Ceramics, 2015 (February), 1–6. https://doi.org/10.1155/2015/213635
  • Martin, B. C., Tracy, C. J., Mayer, J. W., & Hendrickson, L. E. (1995). A comparative study of Hillock formation in aluminum films. Thin Solid Films, 271(1–2), 64–68. https://doi.org/10.1016/0040-6090(95)06941-0
  • Muralidhar Singh, M., Vijaya, G., Krupashankara, M. S., Sridhara, B. K., & Shridhar, T. N. (2018). Deposition and Characterization of aluminium thin film coatings using DC magnetron sputtering process. Materials Today: Proceedings, 5(1), 2696–2704. https://doi.org/10.1016/j.matpr.2018.01.050
  • Mwema, F. M., Akinlabi, E. T., & Oladijo, O. P. (2018). A review of finite element modelling of nanoindentation and micro-scratch techniques in characterizing thin films. Eleventh South African Conference on Computational and Applied Mechanics, 11, 650–658.
  • Mwema, F. M., Oladijo, O. P., & Akinlabi, E. T. (2018). Effect of substrate temperature on aluminium thin films prepared byrf-magnetron sputtering. Materials Today: Proceedings, 5(9), 20464–20473. https://doi.org/10.1016/j.matpr.2018.06.423
  • Mwema, F. M., Oladijo, O. P., Akinlabi, S. A., & Akinlabi, E. T. (2018). Properties of physically deposited thin aluminium film coatings: A review. Journal of Alloys and Compounds, 747 (May), 306–323. https://doi.org/10.1016/j.jallcom.2018.03.006
  • Mwema, F. M., Oladijo, O. P., Sathiaraj, T. S., & Akinlabi, E. T. (2018, April). Atomic force microscopy analysis of surface topography of pure thin aluminum films. Materials Research Express, 5(4), 1–15. https://doi.org/10.1088/2053-1591/aabe1b
  • Pakhuruddin, M. Z., Ibrahim, K., & Aziz, A. A. (2012). Properties of aluminium thin films on polyethylene terephthalate substrates as back contacts in thin film silicon solar cells. International Journal of Polymeric Materials, 61(9), 669–678. https://doi.org/10.1080/00914037.2011.610068
  • Qiu, H., Wang, F., Wu, P., Pan, L., Li, L., Xiong, L., & Tian, Y. (2002). Effect of deposition rate on structural and electrical properties of Al films deposited on glass by electron beam evaporation. Thin Solid Films, 414(1), 150–153. https://doi.org/10.1016/S0040-6090(02)00454-6
  • Quintana, P., Oliva, A. I., Ceh, O., Corona, J. E., & Aguilar, M. (1999). Thickness effects on aluminum thin films. Superficies y Vacio, 9(December), 280–282.
  • Rajesh Kumar, B., & Subba Rao, T. (2012). AFM studies on surface morphology, topography and texture of nanostructured zinc aluminum oxide thin films. Digest Journal of Nanomaterials and Biostructures, 7(4), 1881–1889.
  • Simon, A. H. (2018). Sputter processing. In Krishna Seshan (Ed.), Handbook of thin film deposition (pp. 195–230). Elsevier.
  • Wasa, K., & Hayakawa, S. (1992). Handbook of sputter deposition technology. Noyes Publications.