Experimental study on performance evaluation of passive valved piezoelectric micropumps with series, parallel and hybrid series-parallel configuration

References

• Mohith S, Karanth PN, Kulkarni SM. Recent trends in mechanical micropumps and their applications: a review. Mechatronics. 2019;60(April):34–55.
   Google Scholar
• Tsai N, Sue C. Review of MEMS-based drug delivery and dosing systems. Sens Actuators A. 2007;134(2):555–564.
   Google Scholar
• Nisar A, Afzulpurkar N, Mahaisavariya B, et al. MEMS-based micropumps in drug delivery and biomedical applications. Sensors and Actuat B Chem. 2008;130:917–942.
   Web of Science ®Google Scholar
• Wang YN, Fu LM. Micropumps and biomedical applications – a review. Microelectron Eng. 2017;195(December):121–138.
   Google Scholar
• Amirouche F, Zhou Y, Johnson T. Current micropump technologies and their biomedical applications. Microsyst Technol. 2009;15(5):647–666.
   Web of Science ®Google Scholar
• Haldkar RK, Gupta VK, Sheorey T. Modeling and flow analysis of piezoelectric based micropump with. J Mech Sci Technol. 2017;31(6):2933–2941.
   Web of Science ®Google Scholar
• Gidde RR, Pawar PM, Ronge BP, et al. Design optimization of an electromagnetic actuation based valveless micropump for drug delivery application. Microsyst Technol. 2018;0123456789:509–519.
   Google Scholar
• Bossebuf A, Bourouina T, Grandchamp J-P. Design and simulation of an electrostatic micropump for drug-delivery applications. J Micromech Microeng. 1999;7(3):186–188.
   Web of Science ®Google Scholar
• Asadi Dereshgi H, Dal H, Yildiz MZ. Piezoelectric micropumps: state of the art review. Microsyst Technol. 2021 Jan;27(12):4127–4155.
   Web of Science ®Google Scholar
• Joshitha C, Sreeja BS, Radha S. A review on micropumps for drug delivery system. International Conference on Wireless Communications, Signal Processing and Networking. 2017;186–190. DOI:10.1109/WiSPNET.2017.8299745
   Google Scholar
• Zhang T, Wang Q. Valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices. J Power Sources. 2005;140:72–80.
   Web of Science ®Google Scholar
• Zhang Z, Chen S, Wang S, et al. Performance evaluation and comparison of a serial–parallel hybrid multichamber piezoelectric pump. J Intell Mater Syst Struct. 2018;29(9):1995–2007.
   Web of Science ®Google Scholar
• Ullmann A, Taitel Y. The piezoelectric valve-less pump: series and parallel connections. J Fluids Eng. 2015 Feb;137(2):1–9.
   Web of Science ®Google Scholar
• Li Z, Mak SY, Sauret A, et al. Syringe-pump-induced fluctuation in all-aqueous microfluidic system implications for flow rate accuracy. Lab Chip. 2014;14(4):744–749.
   PubMed Web of Science ®Google Scholar
• Dhananchezhiyan P, Hiremath SS. Improving the performance of micro pumps by reduction of flow pulsation for drug delivery application. Adv Mater Process Technol. 2018;0698:1–15.
   Google Scholar
• Ullmann A. The piezoelectric valve-less pump—performance enhancement analysis. Sens Actuators A. 1998;69:97–105.
   Google Scholar
• Yang BK, Chen I, Wang C. Performance of nozzle/diffuser micro-pumps subject to parallel and series combinations. Chem Eng Technol. 2006;29(6):703–710.
   Web of Science ®Google Scholar
• Kan J, Tang K, Liu G, et al. Development of serial-connection piezoelectric pumps. Sens Actuators A. 2008;144:321–327.
   Google Scholar
• Azarbadegan A, Eames I, Wojcik A, et al. Combination rules for multichamber valveless micropumps. Journal of Microelectromechanical Systems. 2013;22(5):1133–1139.
   Web of Science ®Google Scholar
• Azarbadegan A, Eames M, Zangeneh I. Analysis of double-chamber parallel valveless micropumps. Microfluid Nanofluidics. 2010;i:171–180.
   Google Scholar
• Azarbadegan A, Moeendarbary E, Eames I. Investigation of double-chamber series valveless micropump: an analytical approach. International Conference on Quantum, Nano and Micro Technologies. 2010;section IV:107–112. DOI:10.1109/ICQNM.2010.27.
   Google Scholar
• Azarbadegan A, Eames I, Sharma S, et al. Sensors and actuators B: chemical computational study of parallel valveless micropumps. Sens Actuators B Chem. 2011;158(1):432–440.
   Web of Science ®Google Scholar
• Wang W, Zhang Y, Tian L, et al. Piezoelectric diffuser/nozzle micropump with double pump chambers. Front Mech Eng China. 2008;3(4):449–453.
   Google Scholar
• Dhananchezhiyan P, Hiremath SS. Optimization of multiple micro pumps to maximize the flow rate and minimize the flow pulsation. Procedia Technol. 2016;25(Raerest):1226–1233.
   Google Scholar
• Vante AB, Kanish TC. Experimental investigation on digital offset switching strategy for precise dosing using digital multiple micropump infusion system. Microfluid Nanofluidics. 2022 Dec;26(12):92.
   Web of Science ®Google Scholar
• Revathi S, Padmapriya N, Padmanabhan R. A design analysis of piezoelectric-polymer composite-based valveless micropump. Int J Model Simul. 2019;39(2):110–124.
   Google Scholar
• Singh S, Kumar N, George D, et al. Analytical modeling, simulations and experimental studies of a PZT actuated planar valveless PDMS micropump. Sens Actuators A Phys. 2015;225:81–94.
   Web of Science ®Google Scholar
• Dong J, Cao Y, Chen Q, et al. Performance of single piezoelectric vibrator micropump with check valve. J Intell Mater Syst Struct. 2020;31(1):117–126.
   Web of Science ®Google Scholar
• Sateesh J, Girija Sravani K, Akshay Kumar R, et al. Design and flow analysis of MEMS based piezo-electric micro pump. Microsyst Technol. 2018;24(3):1609–1614.
   Web of Science ®Google Scholar
• Shyng T, Ding L, Gong C, et al. Numerical and experimental studies of phase difference effects on flow rate of peristaltic micro ‑ pumps with pumping chambers in series configurations. Microsyst Technol. 2017;23(1):329–341.
   Google Scholar