Growth of crystalline phase change materials by physical deposition methods

Jos E. BoschkerDepartment of Epitaxy, Paul-Drude-Institut für Festkörperelektronik, Berlin, Germany;Ferroelectric Oxide Layers, Leibniz Institute for Crystal Growth, Berlin, Germany

http://orcid.org/0000-0001-9122-2079

Raffaella CalarcoDepartment of Epitaxy, Paul-Drude-Institut für Festkörperelektronik, Berlin, GermanyCorrespondence[email protected]

Pages 675-694 | Received 03 May 2017, Accepted 18 Jun 2017, Published online: 17 Jul 2017

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https://doi.org/10.1080/23746149.2017.1346483
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