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Journal of Adhesion Science and Technology Volume 18, 2004 - Issue 7

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Research Articles

Non-contact removal of 60-nm latex particles from silicon wafers with laser-induced plasma

Ivin Varghese

Cetin Cetinkaya

Pages 795-806 | Published online: 02 Apr 2012

Cite this article
https://doi.org/10.1163/156856104840327

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2002 . The International Technology Roadmap for Semiconductors 2002 Update accessible at http://public.itrs.net/Files/2002Update/2002Update.pdf
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