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Journal of Electromagnetic Waves and Applications Volume 23, 2009 - Issue 2-3
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Articles

Demonstration of a Tunable RF MEMS Bandpass Filter Using Silicon Foundry Process

L. Li Centre for Microsystems and Photonics, Department of Electronic and Electrical Engineering, University of Strathclyde UK;, Email: [email protected]
&
D. Uttamchandani Centre for Microsystems and Photonics, Department of Electronic and Electrical Engineering, University of Strathclyde UK
Pages 405-413 | Published online: 03 Apr 2012

References

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  • Blondy , P. , Brown , A. R. , Cros , D. and Rebeiz , G. M. 1998 . Low-loss micromachined filters for millimetre-wave communication systems . IEEE Transactions on Microwave Theory and Techniques , 46 ( 12 ) December
  • Lucyzyn , S. , Miyaguchi , K. , Jiang , H. W. , Robertson , I. D. , Fisher , G. , Lord , A. and Choi , J. Y. 2008 . Micromachined RFcoupled cantilever inverted-microstrip millimetre-wave filters . IEEE/ASME Journal ofMicr oelectromechanical Systems , 17 ( 3 ) June : 767 – 776 .
  • Li , L. and Uttamchandani , D. 2008 . MEMS microwave device with switchable capacitive and inductive states . IET Micro & Nano Letters , 3 ( 3 ) September : 77 – 81 .
  • Varadan , V. K. , Vinoy , K. J. and Jose , K. A. 2003 . RF MEMS and Their Applications , England : John Wiley & Sons Ltd. .
  • SOIMUMPs foundry process , MEMSCAP Inc. . http://www.mem srus.com/

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