- IL F. WALTON: J. Electrochem. Soc., 1950, 97, 219 —226.
- P. V. SHIGOLEV: ‘Electrolytic and chemical polishing of metals’, 2nd edn, 7; 1974, Tel-Aviv, Israel, Freund Publishing House.
- J. EDWARDS: J. Electrochem. Soc., 1953, 97, 223C-230C.
- C. WAGNER: J. Electrochem. Soc., 1954, 101, 225–228.
- M. NOVAK, A. K. N. REDDY and H. WROBLOWA: J. Electrochem. Soc., 1970, 117, 733–737.
- R. SOUTEBIN and D. LANDOLT: J. Electrochem. Soc., 1982, 129, 946— 953.
- P. NEUFELD and T. ZERVAS: Surf Technol., 1979, 8, 129–135.
- D. LANDOLT: Electrochim. Acta, 1987, 32, 1–11.
- R. SOUTEBIN, H. FROIDEVAUX and D. LANDOLT: J. Electrochem Soc., 1982, 127, 1096–1100.
- J. L. FANG and N. J. WU: J. Electrochem. Soc., 1989,136, 3800— 3803.
- R. J. CONTOLINI, A. F. BERNHARDT and S. T. MAYER: J. Electrochem. Soc., 1994, 141, 2503–2510.
- DATTA et al.: US Patent 5,567,300, 22 October 1996.
- J. L. FANG, X. MA and W. Lu: Chem. J. Chinese Univ., 1981, 2, 285–292.
- M. PAUNOVIC and M. SCHLESINGER: ‘Fundamentals of electro-chemical deposition’, 73–97; 1998, New York, John Wiley & Sons, Inc.
- V. A. DMITRIEV and E. V. RZHEVSKAYA: Russian J. Phys. Chem., 1961, 35, 425–429.
- A. J. BARD, R. PARSONS and J. JORDAN: ‘Standard poten-tials in aqueous solution’, 41, 292; 1985, New York, Marcel Dekker, Inc., International Union of Pure and Applied Chemistry.
- S. H. GLARUM and J. H. MARSHALL: J. Electrochem. Soc., 1985, 132, 2872–2878.
- S. H. GLARUM and J. H. MARSHALL: J. Electrochem. Soc., 1985, 132, 2878–2885.
- L. J. KORB, D. L. OLSON and J. R. DAVIS et al.: ‘,Metals Handbook’, 9th end, Vol. 13, 35; 1978, ASM International, Metals Park, Ohio.
Electrochemical Polishing of Copper for Microelectronic Applications
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