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Surface Engineering Volume 19, 2003 - Issue 2
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Articles

Sidewall Surface Roughness of Sputtered Silicon I: Surface Modelling

M. Y. Ali Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
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N. P. Hung Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
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B. K. A. Ngoi Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
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S. Yuan Dr Ali ([email protected]), Dr Ngoi and Mr Yuan are at the Precision Engineering and Nanotechnology Centre, School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore639798. Dr Hung is in the Mechanical Engineering Department, College of Engineering, San Diego State University, 5500 Campanile Drive, San Diego, CA 92182, USA.
Pages 97-103 | Published online: 19 Jul 2013

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