Advanced search
Publication Cover
British Ceramic Transactions Volume 103, 2004 - Issue 2: 55 Years of ferroelectrics - papers in honour of Eric Cross
Journal homepage
19
Views
5
CrossRef citations to date
0
Altmetric
Articles

Chemical solution deposition of PZT thin layers on silicon: densification and stress development

R.J. Ong
&
D.A. Payne
Pages 97-100 | Published online: 18 Jul 2013

  • K. D. BUDD, S. K. DEY and D. A. PAYNE: Proc. Br. Ceram. Soc.., 1985, 36, 107–121.
  • C. D. E. LAKEMAN and D. A. PAYNE: J. Am. Ceram. Soc.., 1992, 75, 3091–3096.
  • A. J. MOULSON and J. M. HERBERT: `Electroceramics: materials, properties, applications'; 1990, London, Chapman and Hall.
  • R. E. NEWNHAM and G. R. RUSCHAU: J. Am. Ceram. Soc.., 1991, 74, 463–480.
  • R. W. SCHWARTZ, J. A. VOIGT, B. A. TUTTLE, D. A. PAYNE, T. L. REICHERT and R. S. DASALLA: J. Mater. Res.., 1997, 12, 444–456.
  • M. H. FREY, Z. XU, P. HAN and D. A. PAYNE: Ferroelectrics., 1998, 206/207, 337–353.
  • T. J. GARINO and M. HARRINGTON: in Terroelectric thin films II', (ed. A. I. Kingon, E. R. Myers and B. A. Tuttle), 341–347; 1992, Pittsburgh, PA, MRS.
  • G. A. C. M. SPIERINGS, G. J. M. DORMANS, W. G. J. MOORS, M. J. E. ULENAERS and P. K. LARSEN: J. Appl. Phys.., 1995, 78, 1926–1933.
  • B. A. TUTTLE, J. A. VOIGT, T. J. GARINO, D. C. GOODNOW, R. W. SCHWARTZ, D. L. LAMPPA, T. J. HEADLEY and M. O. EATOUGH: in Proc. Eighth IEEE Int. Symp. on Applications of Ferroelectrics, (ed. M. Liu, A. Safari, A. Kingon and G. Haertling), 344–348; 1992, Greenville, SC, IEEE.
  • R. A. ASSINK and R. W. SCHWARTZ: Chem. Mater.., 1993, 5, 511–517.
  • C. D. E. LAKEMAN: PhD thesis, University of Illinois at Urbana-Champaign, IL, USA, 1994.
  • J. F. SHEPARD JR, S. TROLIER-MCKINSTRY, M. A. HENDRICKSON and R. ZETO: in Proc. Tenth IEEE Int. Symp. on Applications of Ferroelectrics, (ed. B. M. Kulwicki, A. Amin and A. Safari), 161–165; 1996, East Brunswick, NJ, IEEE.
  • S. S. SENGUPTA, S. M. PARK, D. A. PAYNE and L. H. ALLEN: J. Appl. Phys.., 1998, 83, 2291–2296.
  • G. G. STONEY: Proc. R. Soc. (London) A., 1909, 82, 172–175.
  • J. R. ADAMS: PhD thesis, University of Nebraska-Lincoln, NE, USA, 1974.
  • S. S. SENGUPTA, S. M. PARK and D. A. PAYNE: illtegr. FerrOeieCtr.., 1997, 14, 193–200.
  • A. D. POLLI, F. F. LANGE and C. G. LEVI: J. Am. Ceram. Soc.., 2000, 83, 873–881.
  • R. J. ONG: MS thesis, University of Illinois at Urbana-Champaign, IL, USA, 2001.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Order Reprints Request Corporate Permissions

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

Request Academic Permissions

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.

Related research

People also read lists articles that other readers of this article have read.

Recommended articles lists articles that we recommend and is powered by our AI driven recommendation engine.

Cited by lists all citing articles based on Crossref citations.
Articles with the Crossref icon will open in a new tab.