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Materials Research Innovations Volume 19, 2015 - Issue sup9: 2015 International Conference on Materials Science (ICMS2015)
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Research Papers

Nanoadhesive materials on micro cutters in micro/nanomilling of single crystal silicon

H. Y. LiuSchool of Mechanical Instrumental EngineeringXi'an University of Technology, Xi'an710048, ChinaCorrespondence[email protected]
,
Y. M. HuangSchool of Mechanical Instrumental EngineeringXi'an University of Technology, Xi'an710048, China
,
X. ChengSchool of Mechanical EngineeringShandong University of Technology, Zibo255049, China
&
X. G. YangSchool of Mechanical Instrumental EngineeringXi'an University of Technology, Xi'an710048, China
Pages S9-333-S9-336 | Received 29 Sep 2014, Accepted 30 Dec 2014, Published online: 23 Nov 2015

References

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  • X. Cheng, Z. G. Wang, K. Nakamoto and K. Yamazaki: ‘Study on the micro custom PCD tooling for ductile-regime micro/nano machining of single crystal silicon’, The 5th Int. Conf. on MicroManufacturing, Madison, USA, April 2010, Paper 2.
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