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Articles

Characterization of microelectromechanical systems by digital holography method

Pages 103-110 | Published online: 18 Jul 2013

References

  • Goodman, J. W. and Lawrence, R. W. Digital image formation from electronically detected holograms Appl. Phys. Lett., 1967, 11, 77–79.
  • Kronrod, R. W., Merzlyakov, N. S. and Yaroslavskii, L. P. Reconstruction of a hologram with a computer. Sov. J. Tech. Phys, 1972, 17, 333–334.
  • Schanrs, U. and Juptner, W. Direct recording of holograms by a CCD target and numerical reconstruction. Appl. Opt., 1994, 33, 179–181.
  • Jacquot, M., Sandoz, P. and Tribillon, G. High resolution digital holography. Opt. Commun., 2001, 190, 87–94.
  • Cuche, E., Marquet, P. and Depeursinge, C. Simultaneous amplitude-contrast and quantitative phase-contrast microscopy by numerical reconstruction of Fresnel off-axis holograms. Appl. Opt., 1999, 38, 6994–7001.
  • Senturia, S. D. Microsystem Design, 2001 (Kluwer Academic, London).
  • Schnars, U. and Jueptner, W. Digital recording and numerical reconstruction of holograms. Meas. Sci. Technol., 2002, 13, R85–R101.
  • Pedrini, G., Schedin, S. and Tiziani, H. J. Aberration compensation in digital holographic reconstruction of microscopic objects. J. Mod. Opt., 2001, 48, 1035–1041.
  • De Nicola, S., Ferraro, P., Finizio, A., Coppola, G., Grilli, S., Magro, C. and Pierattini, G. Compensation of the inherent wave front curvature in digital holographic coherent microscopy for quantitative phase-contrast imaging. Appl. Opt., 2003, 42, 1938–1946.
  • Ferraro, P., Coppola, G., De Nicola, S., Finizio, A., Pierattini, G. and Alfieri, D. Controlling image size as a function of distance and wavelength in Fresnel trans-form reconstruction of digital holograms. Opt. Lett., 2004, 29, 854–856.
  • Baltiysky, S., Gurov, I., De Nicola, S., Ferraro, P., Finizio, A. and Coppola, G. Digital holography applied to characterization of microelectromechanical systems. Proc. Int. Topical Meeting on Optical Sensing and Artificial Vision: OSAV’2004, Saint Petersburg, Russia, October 2004, Saint Petersburg State University of Information Technologies, Mechanics and Optics, 202–209.

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