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Materials Science and Technology Volume 25, 2009 - Issue 8
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Articles

Study of internal stress of amorphous Ni–W alloy films

R. LiuKey Laboratory for Thin Film and Microfabrication Technology of Ministry of EducationNational Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China
,
H. WangKey Laboratory for Thin Film and Microfabrication Technology of Ministry of EducationNational Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China;, Email: [email protected]
,
X.-P. LiKey Laboratory for Thin Film and Microfabrication Technology of Ministry of EducationNational Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China
&
G.-F. DingKey Laboratory for Thin Film and Microfabrication Technology of Ministry of EducationNational Key Laboratory of Micro/Nano Fabrication Technology, Research Institute of Micro/Nano Science and Technology, Shanghai Jiao Tong University, Shanghai 200030, China
Pages 960-968 | Published online: 19 Jul 2013

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