64
Views
2
CrossRef citations to date
0
Altmetric
Articles

Low temperature deposition of ultrathin molybdenum carbide films and microstructural characterisation

, , , &
Pages 318-322 | Published online: 19 Jul 2013

References

  • M.-A. Nicole: Thin Solid Films, 1978, 52, 415.
  • A. E. Kaloyeros and E. Eisenbraun: Annu. Rev. Mater. Sci., 2000, 30, 363.
  • W. P. Leroy, C. Detavernier, R. L. van Meirhaeghe, A. J. Kellock and C Lavoie: J. Appl. Phys., 2006, 99, 063704.
  • T. Laurila, K. Zeng, J. K. Kivilahti, J. Molarius, T. Riekkinen and I. Suni: Microelectron. Eng., 2002, 60, 71.
  • H. Y. Chen, L. Chen, Y. Lu, Q. Hong, H. C. Chua, S. B. Tang and J. Lin: CataL Today, 2004, 96, 161.
  • H. W. Hugosson, U. Jansson B. Johansson and O. Eriksson: Chem. Phys. Lett., 2001, 333, 444.
  • Q. Zhu, Q. Chen, X. Yang and D. Ke: Mater. Lett., 2007,61, 5173–5174.
  • A. M. Nartowski, I. P. Parkin, M. Mackenzie, A. J. Craven and I. Macleod: J. Mater. Chem., 1999, 9, 1275.
  • N. Shoholi, J.-M. Badie, B. Granier, F. Almeida, C. Oliveira, J. C. Fernades and L. G. Rosa: Int. J. Refract. Met. Hard Mater., 2007, 25, 220–225.
  • Rush, S. F. Yoon, Q. F. Huang, H. Yang, M. B. Yu, Q. Zhang, E. J. Teo, T. Osipowicz and F. Watt: J. Appl. Phys., 2000, 88, (6), 15.
  • P. K. Srivastava, T. V. Rao, V. D. Vankar and K. L. Chopra: J. Vac. Surf Films, 1984, 2, 1261.
  • A. A. Voevodin, M. A. Capano, S. J. P. Laube, M. S. Donley and J. S. Zabiski: Thin Solid Films, 1997, 298, 107.
  • Y. Pauleau and F. Thiery: Surf Coat. Technol, 2004, 180-181,313.
  • K. Y. Fu Ricky, Y. F. Mei, L. R. Shen, G. G. Siu, P. K. Chu, W. Y. Cheung and S. P. Wong: Surf Coat. TechnoL, 2004, 186, 112.
  • P. Muret, F. Pruvost, C. Saby, E. Lucazeau, T. A. Nguyen Tan, E. Gheeraert and A. Deneuville: Diamond Relat Mater., 1999, 8, 961.
  • D. Kabiraj, S. R. Abhilash, L. Vanmarcke, N. Cinausero, J. C. Pivin and D. K. Avasthi: Nucl. Instrum. Method Phys. Res. B, 2006, 244B, 100.
  • P. Schwarzkopt and R. Kieffer: ‘Refractory hard metals’; 1953, New York, Macmillan.
  • R. Yang, L. Chui, Y. Zheng and X. Cai: Mater. Lett., 2007, 61, 4815.
  • M. J. Fransen, J. Te Nijenhuis, J. H. A. Vasterink, R. L. Stolk and J. J. Schermer: ‘Advances in X-ray analysis’, Vol. 46, 185-191, and data in Mo2C: 35-0787; 2003, New York, Plenum Press.
  • S. Mikhailov, J. Weber, Y. Baer, W. Hanni and X. M. Tang: Solid State Commun., 1995, 93, (11), 869.
  • Q. Liu, T. Liu, Q. F. Fang, F. J. Liang and J. X. Wang: Thin Solid Films, 2006, 503, 79.
  • J. Nakanishi, A. Otsuki, T. Oku, O. Ishiwata and M. Murakami: J. Appl. Phys., 1994, 76, (4), 2293.

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.