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Materials Science and Technology Volume 27, 2011 - Issue 11
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Original Article

Microstructure and properties of nc-TiC/a-C∶H films deposited by radio frequency reactive sputtering

X Q Liu State Key Laboratory of Solid LubricationLanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou730000, China; Graduate University of Chinese Academy of ScienceBeijing100049, China
,
J Yang State Key Laboratory of Solid LubricationLanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou730000, China
,
J Y Hao State Key Laboratory of Solid LubricationLanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou730000, ChinaCorrespondence[email protected]
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W M Liu State Key Laboratory of Solid LubricationLanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou730000, China
Pages 1669-1673 | Received 18 Sep 2010, Accepted 04 Nov 2010, Published online: 12 Nov 2013

References

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