References
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- Hothersall Memorial Award Lecture 2007, Trans. Inst. Metal Finish., 2008, 86, 19–33
- Semiconducter Micromachining Vols. 1 & 2, eds. S A Campbell and H J Lewerenz, J Wiley & Sons, Chichester (1999)
- S A Campbell, Y Li, S Breakspear, F C Walsh and J R Smith, Trans. Inst. Metal Finish., 2007, 85, 237–244
- C Ponce-de-Leon, S A Campbell, J R Smith and F C Walsh, Trans. Inst. Metal Finish., 2008, 86, 34–40
- R C Tangirala, C T J Low, C Ponce-de-Leon, S A Campbell and F C Walsh, Trans. Inst. Metal Finish., 2010, 88, 84–92