LITERATURE CITED
- E. W. Becker, W. Ehrfeld, P. Hagmann, A. Maner and D. Münchmeyer: ‘Fabrication of microstructures with high aspect ratios and great structural heights by synchrotron radiation lithography, galvanoforming, and plastic molding (LIGA process)’, Microelectron. Eng., 1986, 4, 35–56.
- W. Ehrfeld: ‘The LIGA process for microsystems’, in ‘Micro system technologies 1990 ’, (ed. H. Reichl), 521–528; 1990, Heidelberg, Springer-Verlag.
- W. Menz and P. Bley: ‘Mikrosystemtechnik für Ingenieure’; 1993, Weinheim, VCH Verlagsgesellschaft mbH.
- P. Bley, J. Göttert, M. Harmening, M. Himmelhaus, W. Menz, J. Mohr, C. Müller and U. Wallrabe: ‘The LIGA-process for the fabrication of micromechanical and microoptical components’, in ‘Micro system technologies 1991 ’, (ed. H. Reichl), 302–314; 1991, Heidelberg, Springer-Verlag.
- A. Michel, R. Ruprecht and W. Bacher: ‘Abformung von Mikrostrukturen auf prozessierten Wafern’, Report 5171, Kernforschungszentrum Karlsruhe, Germany, 1993.
- F. Nöker and E. Beyer: ‘Herstellung von Mikrostrukturkörpern aus Keramik’, Keram. Z., 1992, 44, 677–681.
- C. Burbaum, J. Mohr, P. Bley and W. Menz: ‘Fabrication of electrostatic microdevices by the LIGA technique’, Sensors Mater., 1991, 3, (2), 75–85.
- M. Harmening, W. Bacher, P. Bley, A. El-Kholi, H. Kalb, B. Kowanz, W. Menz, A. Michel and J. Mohr: ‘Molding of threedimensional microstructures by the LIGA process’, in ‘Micro electro mechanical systems 1992’, IEEE Cat. No. 0–7803–0497–7/92, 202–207; 1992, New York, Institute of Electrical and Electronics Engineers.
- J. Mohr, C. Burbaum, P. Bley, W. Menz and U. Wallrabe: ‘Movable microstructures manufactured by the LIGA process as basic elements for micro systems’, in ‘Micro system technologies 1990 ’, (ed. H. Reichl), 529–537; 1990, Heidelberg, Springer-Verlag.
- U. Wallrabe, P. Bley, B. Krevet, W. Menz and J. Mohr: ‘Theoretical and experimental results of an electrostatic micro motor with large gear ratio fabricated by the LIGA process’, in ‘Micro electro mechanical systems 1992’, IEEE Cat. No. 0–7803–0497–7/92, 139–140; 1992, New York, Institute of Electrical and Electronics Engineers.
- R. Rapp, P. Bley, W. Menz and W. K. Schomburg: ‘Micropump fabricated with the LIGA process’, in ‘Micro electro mechanical systems 1993’, IEEE Cat. No. 0–7803–0957–2/93, 123; 1993, New York, Institute of Electrical and Electronics Engineers.
- C. Müller and J. Mohr: ‘Microspectrometer fabricated by the Liga process’, Interdisc. Sci. Rev., this issue, pp. 273–279.
- W. Menz: ‘Microsystems – the new technological revolution’, Interdisc. Sci. Rev., this issue, pp. 253–258.