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Original Articles

A Robust 3-D Structure for Superjunction VDMOS Under Unclamped Inductive Switching Condition

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Pages 447-450 | Published online: 01 Sep 2014

References

  • G Deboy, M Marz, JP Stengl, H Strack, J Tihanyi, and H Weber, “A new generation of high voltage MOSFETs breaks the limit line of silicon,” in IEDM Tech. Dig, pp. 683–5, 1998.
  • T Fujihira, “Theory of semiconductor superjunction devices,” jpn. J. Appl. Phys., Vol.36, pp. 6254–62, 1997.
  • X B Chen and J K Shin; “Optimization of the specific on-resistance of the COOLMOSTM,” IEEE Trans. Electron Devices, vol. ED-48, pp.241–4,2002.
  • J Zeng and C F Wheatley, “An improved power MOSFET using a novel split well structure,” in Proc. ISPSD, Toronto, Ont, Canada, pp. 205–9, May 1999.
  • C Kocon, J Zeng, and R Stokes, “Implant spacer optimization for the improvement of power MOSFETs’ unclamped inductive switching (UIS) and high temperature breakdown,” in Proc. ISPSD, Toulouse, France, pp. 157–60, May 2000.
  • A Narazaki, K Takano, K Oku, H Hamachi, and T Minato, “A marvelous low on-resistance 20 V rated self alignment trench MOSFET(SATMOS) in a 0.35 m LSI design rule with both high forward blocking voltage yield and large current capability,” in Proc. ISPSD, Kitakyushu, Japan, pp. 393–6, May 2004.
  • R K Williams, W Grabowski, M Darwish, M Chang, H Yilmaz, and K Owyang, “A 1 million-cell 2.0-m^ 30-V TrenchFET utilizing 32 Mcell/in2 density with distributed voltage clamping,” in IEDM Tech. Dig., Washington, DC, pp. 363–6, Dec. 1997.
  • I H Ji, K H Cho, M K Han, S C Lee, S S Kim, and K H Oh, et al, “New power MOSFET employing segmented trench body contact for improving the avalanche energy,” in Proc. ISPSD, Orlando, FL, pp.115–9, May 2008.
  • J C Ng, J K Sin, H Sumida, Y Toyoda, A Ohi, and H Tanaka, et al, “Anovel low-voltage trench power MOSFET with improved avalanche capability,” in Proc. ISPSD, Hiroshima, Japan, pp.201–4, Jun. 2010.
  • W Saito, I Omura, S Aida, S Koduki, M Izumisawa, and H Yoshioka, et al, “A 20m^cm2 600 V-class Superjunction MOSFET,” in Proc. ISPSD, Kitakyushu, Japan, pp. 459–62, May 2004.

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