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Aerosol Science and Technology Volume 47, 2013 - Issue 1
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Original Articles

In-Situ Measurements of Charged Nanoparticles Generated During Hot Wire Chemical Vapor Deposition of Silicon Using Particle Beam Mass Spectrometer

Ju-Seop Hong Department of Materials Science & Engineering, Seoul National University, Kwanak-gu, Seoul, Republic of Korea
,
Chan-Soo Kim Department of Materials Science & Engineering, Seoul National University, Kwanak-gu, Seoul, Republic of Korea
,
Seung-Wan Yoo Department of Materials Science & Engineering, Seoul National University, Kwanak-gu, Seoul, Republic of Korea
,
Seong-Han Park Department of Materials Science & Engineering, Seoul National University, Kwanak-gu, Seoul, Republic of Korea
,
Nong-Moon Hwang Department of Materials Science & Engineering, Seoul National University, Kwanak-gu, Seoul, Republic of Korea
,
Hoo-Mi Choi Department of Mechanical Engineering, Sungkyun Advanced Institute of Nano Science and Technology (SAINT), Sungkyunkwan University, Suwon, Republic of Korea
,
Dong-Bin Kim Department of Mechanical Engineering, Sungkyun Advanced Institute of Nano Science and Technology (SAINT), Sungkyunkwan University, Suwon, Republic of Korea
&
Tae-Sung Kim Department of Mechanical Engineering, Sungkyun Advanced Institute of Nano Science and Technology (SAINT), Sungkyunkwan University, Suwon, Republic of Korea
 show all
Pages 46-51 | Received 19 Jun 2012, Accepted 23 Aug 2012, Published online: 19 Sep 2012

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