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Engineering and structural materials
In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis
Andreas SchifferleHelbling Technik AG, Aarau, SwitzerlandCorrespondence[email protected]
, Alex DommannEmpa, Swiss Federal Laboratories for Materials Science and Technology, Center for X-ray Analytics, Dübendorf, Switzerland
& Antonia NeelsEmpa, Swiss Federal Laboratories for Materials Science and Technology, Center for X-ray Analytics, Dübendorf, Switzerland
Pages 219-230
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Received 08 Sep 2016, Accepted 12 Jan 2017, Published online: 31 Mar 2017
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In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis
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In situ MEMS testing: correlation of high-resolution X-ray diffraction with mechanical experiments and finite element analysis
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