Critical Reviews in Solid State and Materials Sciences, Volume 28, Issue 1 (2003)

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Critical Reviews in Solid State and Materials Sciences, Volume 28, Issue 1 (2003)

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Original Articles

Article
Metal Silicides in CMOS Technology: Past, Present, and Future Trends
Shi-Li Zhang & Mikael Östling
Pages: 1-129
Published online: 24 Jun 2010
AbstractforMetal Silicides in CMOS Technology: Past, Present, and Future Trends | PDF (4.6 MB)
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