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Abstract
Proton exchange (PE) is an attractive method for the fabrication of optical and acoustic waveguides in lithium niobate (LiNbO3). LiNbO3 substrate has large electromechanical coupling coefficient (K2) and moderate SAW velocity, but its temperature coefficient of frequency (TCF) is as large as -73 ppm/°C. Silicon dioxide (SiO2) is a well-known non-piezoelectric material having the positive TCF for SAW. The SiO2 thin films are deposited on the PE-LiNbO3 substrates to improve the TCF of the SAW devices. The results show that the temperature stability of SAW on SiO2/PE-LiNbO3 substrate is improved to be about -55 ppm/°C.
Acknowledgement
The National Science Council, the Republic of China, supported this research under contract no. NSC 91-2216-E-237-001 and NSC 90-2216-E-110-025.