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Ferroelectrics Volume 304, 2004 - Issue 1
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Original Articles

Temperature Coefficient of SAW Device on SiO2/Proton Exchanged LiNbO3 Substrate

CHIEN-CHUAN CHENG Department of Electronic Engineering De Lin Institute of Technology Tucheng, Taipei, Taiwan, R.O.C.
,
KUO-SHENG KAO Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.
,
YING-CHUNG CHEN Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.
&
CHUNG-JEN CHUNG Department of Electrical Engineering National Sun Yat-Sen University, Kaohsiung, Taiwan, R.O.C.
Pages 143-145 | Received 01 Aug 2003, Accepted 01 Jan 2004, Published online: 07 Sep 2010

References

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  • Hickernell , F. S. , Ruehle , K. D. , Joseph , S. J. , Reese , G. M. and Weller , J. F. 1985 . The surface acoustic wave properties of proton exchanged YZ lithium niobate . Proc. IEEE 1985 Ultrason. Symp. , : 237 – 240 .
  • Campari , A. , Ferrari , C. , Mazzi , G. , Summonte , C. , Al-Shukri , S. M. , Dawar , A. , DeLaRue , R. M. and Nutt , A. C. G. 1985 . Strain and surface damage induced by proton exchange in Y-cut LiNbO3 . J. Appl. Phys. , 58 : 4521 – 4524 .
  • Burnett , P. J. , Briggs , G. A. D. , Al-Shukri , S. M. , Duffy , J. F. and DeLaRue , R. M. 1986 . Acoustic properties of proton-exchanged LiNbO3 studied using acoustic microscopy V(z) technique . J. Appl. Phys. , 60 : 2517 – 2522 .
  • Saiga , N. and Ichioka , Y. 1987 . Acousto-optic interaction in proton-exchange 128° rotated Y-cut LiNbO3 optical waveguides . J. Appl. Phys. , 61 : 1230 – 1233 .
  • Hinkov , V. 1987 . Proton exchanged waveguides for surface acoustic waves on LiNbO3 . J. Appl. Phys. , 62 : 3573 – 3578 .
  • Wilson , R. G. , Novak , S. W. , Zavada , J. M. , Loni , A. and DeLaRue , R. M. 1989 . Secondary ion mass spectrometry depth profiling of proton-exchanged LiNbO3 waveguides . J. Appl. Phys. , 66 : 6055 – 6058 .
  • Vohra , S. T. , Mickelson , A. R. and Asher , S. E. 1989 . Diffusion characteristics and waveguiding properties of proton-exchanged and annealed LiNbO3 channel waveguides . J. Appl. Phys. , 66 : 5161 – 5174 .
  • Cheng , C. C. , Chen , Y. C. and Wang , S. T. 1996 . Surface acoustic wave properties of z-cut LiNbO3 waveguides fabricated by proton exchange using octanoic acid . J. Phys. D: Appl. Phys. , 29 : 589 – 592 .

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