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Ferroelectrics Volume 186, 1996 - Issue 1
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Section III: Posters

X-Y stage based on piezo-bimorph-elements

Munekazu Kanno College of Engineering, Nihon University, Fukushima, 963, JAPAN
&
Hiroshi Okabe College of Engineering, Nihon University, Fukushima, 963, JAPAN
Pages 269-272 | Received 04 Sep 1995, Published online: 07 Mar 2011
 
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Abstract

An X-Y stage composed of two piezoelectric linear motors has been developed using piezo-bimorph-elements. Piezoelectric linear motors can move forward and backward, using the resonance of only a single piezoelectric element. The linear motor consists of a piezoelectric reed, two tremblers and two guide rails.

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