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Ferroelectrics Volume 186, 1996 - Issue 1

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Section III: Posters

X-Y stage based on piezo-bimorph-elements

Munekazu Kanno College of Engineering, Nihon University, Fukushima, 963, JAPAN

Hiroshi Okabe College of Engineering, Nihon University, Fukushima, 963, JAPAN

Pages 269-272 | Received 04 Sep 1995, Published online: 07 Mar 2011

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Kanno , M. , Okabe , H. and Sakano , S. 1992 . Ferroelectrics , 134 : 83 – 88 .
Web of Science ®Google Scholar
Hayashi , I. , Iwatsuki , N. and Kawai , M. 1992 . Proceedings of Second International Symposium on Micro-Machines and Human Science 73 – 77 . Japan
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Uchino , K. 1988 . Piezoelectric and Electro-Strictive Actuators , Tokyo : Morikita .
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Uchino , K. 1989 . Journal of JSPE , 55
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Tzou , H. S. 1991 . A Piezoelectric Dynamic Actuator for Micro-Isolation and Control, ibid. , : 17 – 27 .
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