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Abstract
Thin-film RC networks are decidedly superior to their monolithic counterparts due to improved circuit performance. TaN films are found to be more suitable for fabricating resistors and capacitors compared to pure tantalum films since they have lower TCR and TCC values. In this article, some results about fabrication and testing of TaN based resistors and capacitors are presented. The results are duly explained in the light of earlier data. The components show a good promise for use in thin-film microcircuits.
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M.N. Mathur
Reddy, P K: Received his BE degree in Electronics and Communication Engineering from the College of Engineering, Kakinada in 1973 and MSc Engg degree in Applied Electronics from Madras Institue of Technology, Madras in 1976. Joined Indian Institute of Technology, Bombay in 1976, carried out Research in Microelectronics and presently, he is working on the development of Thin-Film Passive Components and Hybrid Integrated Circuits using a new base material. Mr. Reddy is a member of IEEE.