Investigation of Various Commonly Associated Imperfections in Radiofrequency Micro-Electro-Mechanical System Devices and its Empirical Modeling

Abstract

This paper outlines the detailed study on the imperfections, which are commonly associated with the realization of Radiofrequency Micro-Electro-Mechanical System (RF-MEMS) devices. It also includes empirical modeling of each phenomenon. These imperfections have been broadly categorized into two major classes: fabrication related and another is linked with IC assembly/packaging method. The thorough study deciphers the insight device physics embedded with all those fabrication and packaging issues in MEMS devices. Individual modeling of these issues gives a clear picture of their impacts on device performances.

KEYWORDS:

• Circuit model
• Epoxy spreading
• Micromachining
• RF-MEMS
• Surface roughness
• Via-hole
• Wire bonding

Acknowledgements

The authors are very much thankful to Director-SCL for his continuous support and motivation throughout this entire research work.

Additional information

Notes on contributors

A. Karmakar

A Karmakar received the MTech (Electronics & Telecom Engineering) degree from NIT-Durgapur. Currently, he is working in SCL/ISRO, Chandigarh as a Scientist-SE. His research interests include design and development of various passive microwave integrated circuits and antennae using silicon based MIC, RF-MEMS and THz-technology. He has authored one technical book named ‘Si-RF Technology’ from Springer and has more than thirty publications in refereed journals and conferences, He serves as a reviewer in top tier international journals, like- IEEE Access, RF-MiCAE, Springer, EJAET, etc. He is the Fellow of IETE and life member of Indian Science Congress Association and ISSE.

B. Biswas

B Biswas received the PhD degree from Jadavpur University, Kolkata in the year 2018 with DST-INSPIRE fellowship. Her field of research is design and development of various ultra wide band antenna using fractal geometries. Currently, she is working in CSIO-CSIR, Chandigarh as a senior research associate under Scientist Pool scheme. She has more than five year academic experience and 20 publications in reputed international and national journals and conferences. Her recent research is development of electrically small antenna for bio-medical applications. She is the life member of IETE, ISSE and Indian Science Congress Association. Email: [email protected]

A.K. Chauhan

A K Chauhan has received the BTech degree (ECE) in 2008 from Uttar Pradesh Technical University. He joined DOS/ISRO in the year 2009 and posted at Semi-Conductor Laboratory, Mohali. He has more than ten years of practical experiences in the field of MEMS. He worked on MEMS based RF devices like switch, antennae and phase shifter. He has also worked on various MEMS based thermal/physical sensors like, thin film temperature sensor, micro-heater, gas and flow sensors. He is the Life member of ISSE, India. Email: [email protected]