What the Sawtooth In Situ Signal Implies about the Surface-reaction Mechanism for Alternate-supply OMVPE Growth of ZnSe

Abstract

The surface chemical processes underlying peculiar sawtooth behavior of optical-reflection signal obtained by in situ monitoring the growing surface of ZnSe epitaxial film under alternate supply of diethylzinc (DEZn) and dimethylselenium (DMSe) were elucidated with the help of ab initio molecular orbital methods. The sawtooth signal was found to imply successful formation of the Zn-stabilized ZnSe surface.

Keywords:

• Surface chemical physics
• Ab initio molecular orbital methods
• Organometallic vapor phase epitaxy
• Wide-bandgap semiconductor

Acknowledgement

This work is financially supported by the Ministry of Education, Culture, Sports, Science and Technology, Japan.