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Original Articles

What the Sawtooth In Situ Signal Implies about the Surface-reaction Mechanism for Alternate-supply OMVPE Growth of ZnSe

Pages 907-910 | Received 01 Feb 2004, Accepted 01 Mar 2004, Published online: 17 Jul 2006

References

References

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  • Hayashi , K , Kanayama , T , Shimizu , T , Kawamura , Y , Kameko , K and Kawakita , S . 2002 . Ab initio molecular orbital characterization of dimethyl group-III azides as sources for photolytic production of free radical beams . Journal of Vacuum Science and Technology, A , 20 : 995
  • Hayashi , K , Kanayama , T , Kojima , H , Omote , N and Shimizu , T . 2003 . Predictive use of ab initio MO methods in PDECB-based approach to low-temperature epitaxy of stoichiometric group-III nitrides . Materials Science in Semiconductor Processing , 6 : 159
  • Hayashi , K , Maeda , A , Fujiyama , M , Kitagawa , Y and Sakudo , N . 2000 . Surface reaction mechanism in MOVPE growth of ZnSe revealed using radicals produced by photolysis of alkyl azide . Applied Surface Science , 154 : 542
  • Hayashi , K . 1994 . Photo-assisted doping of nitrogen into ZnSe using ethyl azide . Applied Physics Letters , 65 : 2084
  • Hayashi K Omote N Kanayama T 2004 Ab initio molecular orbital study on atmosphere-sensitive characteristics of the altemate-supply OMVPE growth of ZnSe Solid State Ionics To be published
  • Frisch MJ Trucks GW Schlegel HB Scuseria GE Robb MA Cheeseman JR Montgomery JA Jr. Vreven T Kudin KN Burant JC Millam JM lyengar SS Tomasi J Barone V Mennucci B Cossi M Scalmani G Rega N Petersson GA Nakatsuji H Hada M Ehara M Toyota K Fukuda R Hasegawa J Ishida M Nakajima T Honda Y Kitao O Nakai H Klene M Li X Knox JE Hratchian HP Cross JB Adamo C Jaramillo J Gomperts R Stratmann RE Yazyev O Austin AJ Cammi R Pomelli C Ochterski JW Ayala PY Morokuma K Voth GA Salvador P Dannenberg JJ Zakrzewski VG Dapprich S Daniels AD Strain MC Farkas O Malick DK Rabuck AD Raghavachari K Foresman JB Ortiz JV Cui Q Baboul AG Clifford S Cioslowski J Stefanov BB Liu G Liashenko A Piskorz P Komaromi I Martin RL Fox DJ Keith T Al-Laham MA Peng CY Nanayakkara A Challacombe M Gill PMW Johnson B Chen W Wong MW Gonzalez C Pople JA 2003 Gaussian 03, Revision B.05, Gaussian, Inc. Pittsburgh, PA

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