晶圓製造廠自動化物料搬運與儲存系統之模擬分析

摘要

由於晶片直徑之發展有逐漸增大的趨勢，且晶片的製造流程也愈來愈複雜，使得傳統的人工搬運方式已不適用，因此在不同加工區域之間導入自動化物料搬運與儲存系統是很需要的。本研究以一家半導體製造公司之八吋晶圓廠爲對象，該廠已導入自動化物料搬運與儲存系統，由於是代工工廠，所生產的產品組合會隨時間而改變，目前該系統已經出現諸如倉儲利用率相差太懸殊等問題。本研究的主要目的是在建立該系統的模擬模式，並考慮各種不同的倉儲管理策略與系統運作參數，使得決策者可以在產品組合改變時，利用已建立之模擬模式進行分析，以找出較佳之倉儲管理策略與系統運作參數。

Abstract

Due to the increasing sizes of wafer diameters and complexity of production process, the traditional transfer approach (Le., move by operators) is not appropriate now. Therefore, it is urgent to install automated interbay material handling and storage systems in a Wafer Fab. The system used in this study is based on a large Wafer Fab installed in Taiwan. The Fab which produces 8-inch wafers began operation in 1995 and has some problems now (e.g., uneven utilization in different stockers). The purpose of this study is to develop a simulation model for the system and then to examine the effects of various experimental factors (e.g., stocker management strategy) on the perfonnance of the system. The simulation model can be used by decision makers to improve the productivity of Wafer Fabs when product mixes have been changed.

關鍵詞:

• 晶圓製造廠
• 自動化物料搬運與儲存系統
• 系統模擬

Key Words:

• Wafer Fab
• automated material handling and storage system
• system
• simulation