References
- Aoki , T. Prospects of the Automation for ULSI Manufacturing . 9th IEEE/CPMT Int. Electronics Manufacturing Technology Sympo-sium . pp. 19 – 22 .
- Busch-Vishniac , I. J. and Jeong , M. C. 1990 . A Magnetic Levitation Micro Automation System for Semiconductor Fabrication . Proc. of 5th Symposium on Automated Integrated Circuits Manufacturing , Vol. 90 ( No.3 ) : 235 – 246 .
- Cardarelli , G. , Pelagagge , P. M. and Granito , A. 1994 . Performance Analysis of Automated Interbay Material Handling and Storage Systems for Large Wafer Fab . 13th IEEE/CPMT Int. Electronics Manufacturing Technology Symposium , : 235 – 241 .
- Chen , J. Y. 1990 . CMOS Devices and Technology for VLSI , Prentice-Hall .
- Fabricius , E. D. 1990 . Introduction to VLSI Design , McGraw-Hill .
- Hayashi , T. 1988 . Factory Automation of Front-end Processing for VLSI Fabrication . Proc. of 3rd Symposium on Automated Integrated Circuits Manufacturing , Vol. 88 ( No. 13 ) : 262 – 298 .
- Hughes , R. A. and Shoot , J. D. 1986 . The Future of Automation for High Volume Wafer Fabrication and ASIC Manufacturing . Proc. of the IEEE , Vol. 74 ( No. 12 ) : 1775 – 1793 .
- Johri , P. K. 1992 . Practical Issues in Scheduling and Dispatching in Semiconductor Wafer Fabrication . Journal of Manufacturing Systems , Vol. 12 ( No.6 )
- Kondo , M. , Woods , G. P. and Pillai , D. 1990 . Automated Transport System in IC Facility . Proc. of 5th Symposium on Automated Integrated Circuits Manufacturing , Vol. 90 ( No.3 ) : 189 – 198 .
- Law , A. M. and Kelton , W. D. 1991 . Simulation Modeling and Analysis , McGraw-Hill .
- Newboe , B. 1992 . Top Fabs of 1992 . Semiconductor International , : 50 – 53 . April
- Pillai , D. 1990 . Material Handling Automation for Wafer Fabrication Facility . 9th IEEE/CPMT Int. Electronics Manufacturing Technology Symposium , : 277 – 286 .
- Pritsker , A. A. B. 1995 . Introduction to Simulation and SLAM II , John Wiley & Sons .
- Pritsker , A. A. B. and O'Reilly , J. J. 1997 . Simulation with Visual SLAM and AweSim , John Wiley and Sons .
- Wang , I. A. , Watanabe , M. and Makino , H. 1991 . A Magnetic Levitation Transport Path . IEEE Transactions on Semiconductor Manufacturing , Vol. 4 : 145 – 154 . May
- Wein , L. M. 1988 . Scheduling Semiconductor Wafer Fabrication . IEEE Transactions on Semiconductor Manufacturing , Vol. 3 : 115 – 130 . August