A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization

Abstract

The authors propose a new design concept for controlling the deflection of a micro-membrane with the aid of its thickness distribution for realizing a prescribed design in the MEMS. As an example, the authors treat a micro air pump that comprises a micro-membrane. The membrane is actuated by an electrostatic force. The membrane deflects and thus the deflection is influenced by the air pressure and the electrostatic field. This is a highly complicated system. To find out a proper thickness distribution, the authors use the genetic algorithm that is appropriate to reduce the searching space of solution.

Presented as a Society of Tribologists and Lubrication Engineers Paper at the ASME/STLE Tribology Conference in Seattle, Washington, October 1–4, 2000

KEY WORDS:

• Micro-Electro-Mechanical System
• Optimization
• Stress Equilibrium

Notes

Presented as a Society of Tribologists and Lubrication Engineers Paper at the ASME/STLE Tribology Conference in Seattle, Washington, October 1–4, 2000