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Tribology Transactions Volume 43, 2000 - Issue 4

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Original Articles

A Study on the Effect of Air on the Dynamic Motion of a MEMS Device and Its Shape Optimization

Hidetoshi Kotera Kyoto University, Department of Mechanical Engineering, Sakyou-ku, Kyoto, Japan

Taku Hirasawa Kyoto University, Department of Mechanical Engineering, Sakyou-ku, Kyoto, Japan

Satoshi Senga Kyoto University, Department of Mechanical Engineering, Sakyou-ku, Kyoto, Japan

Susumu Shima Kyoto University, Department of Mechanical Engineering, Sakyou-ku, Kyoto, Japan

Pages 842-846 | Published online: 25 Mar 2008

Cite this article
https://doi.org/10.1080/10402000008982417

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Kotera , H. , Sakamoto , Y. , Hirasawa , T. , Shima , S. and Dutton , R. W. , MICRO SYSTEM Technologies , p 91 , ( 1998 ).
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