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Abstract
A three-dimensional X-ray irradiated resist with a cylindrical domain is modeled numerically, based on the hybrid finite element and the generalized Marchuk splitting scheme, and the parallel Gaussian elimination technique, in order to analyze the temperature distribution and the potential temperature rise. The hybrid scheme is proved to be unconditionally stable. This numerical procedure is simple and efficient and can be generalized to multilayers, since it converts three-dimensional computations into a sequence of one- and two-dimensional computations. Numerical results are presented with regard to the temperature distribution and the maximum temperature rise.
Notes
Address Correspondence to Dr. W. Dai, Department of Mathematics and Statistics, Louisiana Tech University, P.O. Box 3189, Ruston, LA 71272, USA. E-mail: [email protected]