Publication Cover
Numerical Heat Transfer, Part A: Applications
An International Journal of Computation and Methodology
Volume 32, 1997 - Issue 5
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Original Articles

THREE-DIMENSIONAL NUMERICAL MODEL FOR THERMAL ANALYSIS IN X-RAY IRRADIATED PHOTORESISTS WITH CYLINDRICAL DOMAIN

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Pages 517-530 | Received 30 Apr 1997, Accepted 07 Jun 1997, Published online: 12 Mar 2007

REFERENCES

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  • T. A. Ameel , R. O. Warrington , D. Yu , and G. Dahlbacka , Thermal Analysis of X-ray Irradiated Thick Resists to Determine Induced Structural Deformations , Heat Transfer , vol. 4 , pp. 313 – 318 , 1994 .
  • W. Dai , R. Nassar , R. O. Warrington , and B. Shen , Three-Dimensional Numerical Models for Thermal Analysis in X-Ray Irradiated Photoresists , Numer. Heat Transfer Part A , vol. 31 , pp. 585 – 595 , 1997 .
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  • Address Correspondence to Dr. W. Dai, Department of Mathematics and Statistics, Louisiana Tech University, P.O. Box 3189, Ruston, LA 71272, USA. E-mail: [email protected]

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