EFFECT OF THE HEATING RATE FOR PREHEATING PROCESS ON THE COMPOSITION AND PHASE TRANSFORMATION OF SOL-GEL DERIVED LEAD ZIRCONATE TITANATE THIN FILM

TIEN-I CHANG Department of Material Science and Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan

JOW-LAY HUANG Department of Material Science and Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan

HONG-PING LIN Department of Chemistry, National Cheng Kung University, No. 1, University Road, Tainan, 701, Taiwan

SHENG-CHANG WANG Department of Mechanical Engineering, Southern Taiwan University of Technology, No. 1, Nan-Tai St., Yung-Kang City, Tainan, 710, Taiwan

LONG WU Department of Electrical Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan

CHEN-FU LIN Department of Material Science and Engineering, National Cheng Kung University, No. 1 University Road, Tainan, 701, Taiwan

ABSTRACT

Lead zirconate titanate (PZT, 53/47) thin firms were successfully fabricated on multi-layers substrate by the spin-coating sol-gel process. The effects of different heating rates on the composition and phase transformation of PZT films were discussed. This study focused on the slow heating rate (1°C/min) to the first preheating step (150°C) and to second pyrolysis step (350°C). By XRD method, PZT films contained entirely pure perovskite phase annealing at 700°C for 30 min for the slow heating rate procedure. By using EPMA analysis, the composition of PZT thin film derived by this procedure was indeed located at the MPB region. Furthermore, the phase coexistence was evidenced by the BEI analysis.

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EFFECT OF THE HEATING RATE FOR PREHEATING PROCESS ON THE COMPOSITION AND PHASE TRANSFORMATION OF SOL-GEL DERIVED LEAD ZIRCONATE TITANATE THIN FILM

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EFFECT OF THE HEATING RATE FOR PREHEATING PROCESS ON THE COMPOSITION AND PHASE TRANSFORMATION OF SOL-GEL DERIVED LEAD ZIRCONATE TITANATE THIN FILM

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