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Integrated Ferroelectrics
An International Journal
Volume 75, 2005 - Issue 1
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SECTION E: FeRAM MATERIALS AND DEVICES

EFFECT OF THE HEATING RATE FOR PREHEATING PROCESS ON THE COMPOSITION AND PHASE TRANSFORMATION OF SOL-GEL DERIVED LEAD ZIRCONATE TITANATE THIN FILM

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Pages 55-68 | Received 17 Apr 2005, Published online: 15 Aug 2006

REFERENCES

  • Li , X. S. , Tanaka , T. and Suzuki , Y. 2000 . Preferred orientation and ferroelectric properties of lead zirconate titanate thin films . Thin Solid Films , 375 : 91 – 94 . [CSA]
  • Amanuma , K. , Hase , T. and Miyaska , Y. 1995 . Preparation and ferroelectric properties of SrBi2Ta2O9 thin films . Appl. Phys. Lett. , 66 : 221 – 223 . [CSA] [CROSSREF]
  • Dat , R. , Lee , J. K. , Auciello , O. and Kingon , A. I. 1996 . Metalorganic chemical vapor deposition of ferroelectric SrBi2Ta2O9 thin films . Appl. Phys. Lett. , 68 : 616 – 618 . [CSA] [CROSSREF]
  • Suzuki , H. , Koizumi , T. , Kondo , Y. and Kaneko , S. 1999 . Low-temperature processing of Pb(Zr0.53Ti0.47)O3 thin film from stable precursor sol . J. Euro. Ceram. Soc. , 19 : 1397 – 1401 . [CSA] [CROSSREF]
  • Polcawich , R. G. and Trolier-Mckinstry , S. 2000 . Piezoelectric and dielectric reliability of lead zirconat titanate thin films . J. Mater. Res. , 15 : 2505 – 2513 . [CSA]
  • Norga , G. J. , Maes , J. , Coppye , E. , Fe , L. , Wouters , D. and Van der Biest , O. 2000 . The effect of Pb stiochiometry on switching behavior of Pt/lead zirconate titanate/Pt ferroelectric capacitors . J. Mater. Res. , 15 : 2309 – 2313 . [CSA]
  • Hirano , S. S. , Yogo , T. , Kikuta , K. , Araki , Y. , Saitoh , M. and Ogasahara , S. 1992 . Synthesis of highly oriented lead zirconate-lead titanate film using metallo-organics . J. Am. Ceram. Soc. , 75 : 2785 – 2789 . [CSA] [CROSSREF]
  • Tu , Y. L. , Calzada , M. L. , Phillips , N. J. and Milne , S. J. 1996 . Synthesis and electrical characterization of thin films of PT and PZT made from a diol-based sol-gel route . J. Am. Ceram. Soc. , 79 : 441 – 448 . [CSA] [CROSSREF]
  • Kozuka , K. and Higuchi , A. 2001 . Single-layer submicron-thick BaTiO3 coatings from poly (vinylpyrrolidone)-containing sols: Gel-to-ceramic film conversion, densification, and dielectric properties . J. Mater. Res. , 16 : 3116 – 3123 . [CSA]
  • Jiankang , L. and Xi , Y. 2004 . Microstructure and electrical properties of Pb(Zr0.52Ti0.48)O3 ferroelectric films on different bottom electrodes . Mater. Lett. , 58 : 3447 – 3450 . [CSA] [CROSSREF]
  • San-Yuan , C. and I-Wei , W. 1998 . Texture development, microstructure evolution, and crystallization of chemically derived PZT thin films . J. Am. Ceram. Soc. , 81 : 97 – 105 . [CSA]
  • Huang , Z. , Zhang , Q. and Whatmore , R. W. 1999 . Structure development in the early stages of annealing of sol-gel prepared lead zirconate titanate thin films . 86 : 1662 – 1669 . [CSA]
  • Brooks , K. G. , Klissurska , R. D. , Moeckli , P. and Setter , N. 1997 . Influence of texture on the switching behavior of Pb(Zr0.70Ti0.30)O3 sol-gel derived thin films . J. Mat. Res. , 12 : 531 – 540 . [CSA]
  • Kim , C. J. , Yoon , D. S. , Jiang , Z. T. and No , K. 1997 . Investigation of the drying temperature dependence of the orientation in sol-gel processed PZT thin films . J. Mater. Sci. , 32 : 1213 – 1219 . [CSA] [CROSSREF]
  • Gong , W. , Li , J. F. , Chu , X. and Li , L. 2004 . Effect of pyrolysis temperature on preferential orientation and electrical properties of sol-gel derived lead zirconate titanate films . J. Euro. Ceram. Soc. , 24 : 2977 – 2982 . [CSA] [CROSSREF]
  • Wang , J. , Zhang , L. Y. , Yao , X. and Li , J. K. 2004 . The effect of pyrolyzing temperature to the microstructure of PZT/PT multiplayer thin films . Ceram. Int. , 30 : 1521 – 1524 . [CSA] [CROSSREF]
  • Liu , Yimin and Pradeep Phule , P. 1996 . Nucleation- or growth-controlled orientation development in chemically derived ferroelectric lead zirconate titanate (Pb(ZrxTi1 − x)O3, x = 0.4) thin films . J. Am. Ceram. Soc. , 79 : 495 – 498 . [CSA] [CROSSREF]
  • Yimin , Liu and Pradeep Phule , P. 1997 . Sequence of phase formation in chemically derived ferroelectric lead zirconate titanate Pb(Zr0.4Ti0.6)O3 thin films . J. Am. Ceram. Soc. , 80 : 2410 – 2412 . [CSA]
  • Law , C. W. , Tong , K. Y. , Li , J. H. and Li , K. 1998 . Effect of pyrolysis temperature on the characteristics of PZT films deposited by the sol-gel method . Thin Solid Films , 335 : 220 – 224 . [CSA] [CROSSREF]
  • Reaney , I. M. , Brooks , K. , Klissurska , R. , Pawlaczyk , C. and Setter , N. 1994 . Use of transmission electron microscopy for the characterization of rapid thermally annealed, solution-gel, lead zirconate titanate films . J. Am. Ceram. Soc. , 77 : 1209 – 1216 . [CSA] [CROSSREF]
  • Brooks , K. G. , Reaney , I. M. , Klissurska , R. , Huang , Y. , Bursill , L. and Setter , N. 1994 . Orientation of rapid thermally annealed lead zirconate titanate films on (111) Pt substrates . J. Mater. Res. , 9 : 2540 – 2553 . [CSA]
  • Chang , T. I. , Huang , J. L. , Lin , J. F. , Chen , B. H. , Wu , L. , Lin , H. P. and Lu , H. H. 2004 . Effect of drying temperature on the characteristics of the lead zirconium titanate powders prepared by sol-gel process . Mat. Trans. , 45 : 3150 – 3155 . [CSA] [CROSSREF]

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