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Ferroelectrics Volume 137, 1992 - Issue 1
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Sputtering deposition process of perovskite Pb—Ti—O3 families

Kiyotaka Wasa Matsushita Electric Industrial Co., Ltd., 3–15 Yagumonakamachi, Moriguchi, 570, Japan
,
Hudeafe Adachi Matsushita Electric Industrial Co., Ltd., 3–15 Yagumonakamachi, Moriguchi, 570, Japan
&
Makota Kitabatake Matsushita Electric Industrial Co., Ltd., 3–15 Yagumonakamachi, Moriguchi, 570, Japan
Pages 343-356 | Received 30 Jun 1991, Published online: 10 Feb 2011

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Read on this site (3)

B. Jaber, E. Dogheche, D. Rèmiens & B. Thierry. (1996) Influence of deposition parameters on physico-chemical and optical properties of sputtered PbTiO3 thin films. Integrated Ferroelectrics 13:4, pages 225-237.
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G. Teowee, M.P. Mebes, C.D. Baertlein, E.L. Quackenbush, E.A. Kneer, J.M. Boulton & D.R. Uhlmann. (1995) Compositional tailoring of the dielectric and ferroelectric properties of sol-gel derived PLZT thin films. Integrated Ferroelectrics 10:1-4, pages 131-143.
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K. Wasa, H. Adachi & M. Kitabatake. (1994) Basic deposition process and ferroelectric properties of sputtered PLZT thin films. Ferroelectrics 151:1, pages 1-10.
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Articles from other publishers (8)

Morteza Fathipour, Yanan Xu & Mukti Rana. (2023) Magnetron Sputtered Lead Titanates Thin Films for Pyroelectric Applications: Part 1: Epitaxial Growth, Material Characterization. Materials 17:1, pages 221.
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Ioan Valentin Tudose, Narcisa Vrinceanu, Cristina Pachiu, Stefan Bucur, Petronela Pascariu, Laurentiu Rusen, Emmanuel Koudoumas & Mirela Petruta Suchea. 2019. Functional Nanostructured Interfaces for Environmental and Biomedical Applications. Functional Nanostructured Interfaces for Environmental and Biomedical Applications 285 305 .
E. Dogheche, D. Remiens & G. Velu. (2002) Electrical and optical characterizations by prism-coupling method of PZT deposited in-situ by sputtering. Vacuum 66:1, pages 1-8.
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G Velu & D Remiens. (2000) In situ deposition of sputtered PZT films: control of the growth temperature by the sputtered lead flux. Vacuum 56:3, pages 199-204.
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Kiyotaka Wasa, Yoko Haneda, Toshifumi Satoh, Hideaki Adachi & Kentaro Setsune. (1997) Sputtering deposition of perovskite thin films with atomic-scale controlled surface. Applied Surface Science 121-122, pages 152-155.
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B. Jaber, D. Remiens & B. Thierry. (1996) Substrate temperature and target composition effects on PbTiO3 thin films produced in situ by sputtering . Journal of Applied Physics 79:2, pages 1182-1184.
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Kiyotaka Wasa, Toshifumi Satoh, Kenji Tabata, Hideaki Adachi, Yasumufi Yabuuchi & Kentaro Setune. (2011) Effects of PLT-buffer layer on microstructures of sputtered PLZT thin films epitaxially grown on sapphire. Journal of Materials Research 9:11, pages 2959-2967.
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Kiyotaka Wasa, T. Satoh, K. Tab Ata, H. Adachi, Y. Ichikawa & K. Setsune. (2011) Microstructures of Ultrathin Films of Sputtered PbTiO 3 . MRS Proceedings 361.
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