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Sputtering deposition process of perovskite Pb—Ti—O3 families

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Pages 343-356 | Received 30 Jun 1991, Published online: 10 Feb 2011

References

  • Wasa , K. , Yamazaki , O. , Adachi , H. , Kawaguchi , T. and Setsune , K. 1984 . IEEE J. Lightwave Tech. , LT-2 : 710
  • Land , C. E. , Butler , M. A. and Martin , S. J. 1989 . Proc. of 1989 International Electron Devices Meeting . 1989 , Washington, DC. IEDM-251
  • Adachi , H. , Mitsuyu , T. and Wasa , K. 1985 . Jpn. J. Appl. Phys. Suppl. , 24–1 : 121
  • Iijima , K. , Kawashima , S. and Ueda , I. 1989 . Proc. of 1989 The 3rd Sensor Symposium . 1989 , Tsukuba. pp. 133
  • Carrano , J. , Sudhama , C. , Lee , J. , Tasch , A. and Miller , W. 1989 . Proc. of 1989 International Electron Device Meeting . 1989 , Washington, DC. IEDM89–255
  • Oikawa , M. and Toda , K. 1976 . Appl. Phys. Lett. , 29 : 491
  • Adachi , H. , Kawaguchi , T. , Setsune , K. , Ohji , K. and Wasa , K. 1983 . Appl. Phys. Lett. , 42 : 867
  • Davis , G. M. and Gower , M. C. 1989 . Appl. Phys. Lett. , 55 : 112
  • Nakagawa , T. , Yamaguchi , J. , Okuyama , M. and Hamakawa , Y. 1982 . Jpn. J. Appl. Phys. , 21 : L655
  • Wasa , K. , Kitabatake , M. , Adachi , H. and Hirochi , K. 1987 . Thin Film Processing and Characterization of High-Temperature Superconductors, American Vac. Soc. Series 3 . AIP Conference Proe. No. 165 . 1987 , Anaheim, CA. Edited by: Lucovsky , G. pp. 38
  • Wasa , K. and Hayakawa , S. 1991 . Handbook of Sputtered Deposition Technology , 201 New York : Noyes Publications .
  • Adachi , H. , Kawaguchi , T. , Kitabatake , M. and Wasa , K. 1983 . Jpn. J. Appl. Phys. , 26 : 11 Suppl. 22–2
  • Adachi , H. , Mitsuyu , T. , Yamazaki , O. and Wasa , K. 1987 . Jpn. J. Appl. Phys. , 22 : 15 Suppl. 26–2
  • Adachi , H. , Mitsuyu , T. , Yamazaki , O. and Wasa , K. 1985 . Jpn. J. Appl. Phys. , : 13 Suppl. 24–3
  • Schlom , D. G. , Eckstein , J. N. , Bozovic , I. , Marshall , A. F. , Sizemore , J. T. , Chen , Z. T. , von Dessonneck , K. E. , Harris , S. Jr. and Brauman , J. C. 1989 . Abstract of MRS Fall Meeting . 1989 , Boston. M10.6
  • Wasa , K. 1989 . MRS Fall Meeting . 1989 , Boston. Edited by: Wasa , K. , Adachi , H. , Ichikawa , Y. , Hirochi , K. , Matsushima , T. , Enokihara , A. , Mizuno , K. , Higashino , H. and Setsune , K. Abstract of M10.1.
  • McConnell , R. D. and Wolf , S. A. , eds. 1990 . Science and Technology of Thin Film Superconductors 2 , 1 New York : Plenum Press .
  • Hayashi , S. , Iijima , K. and Hirao , T. Abstract of 1991 MRS Fall Meeting . Boston. pp. 13 1
  • Mitsuyu , T. , Wasa , K. and Hayakawa , S. 1977 . J. Crystal Growth , 41 : 151
  • Wasa , K. , Adachi , H. , Hirochi , K. , Ichikawa , Y. , Matsushima , T. and Setsune , K. 1991 . J. Mater. Res. , 6 : 1595
  • Wasa , K. , Matsushima , T. and Setsune , K. Proc. of 1991 International Symposium on Vac. Sci. Wuxi : Thin Film and Surface Sci. . TF2-WeA2.
  • Kawai , M. , Watanabe , S. and Hanada , T. 1991 . J. Crystal Growth , 112 : 745
  • Farnell , W. G. , Cermak , I. A. , Silvester , P. and Wong , S. K. 1970 . IEEE Trans. Sonics Ultrason. , SU-17 : 188
  • Haertling , G. H. and Land , C. E. 1971 . J. Am. Ceram. Soc. , 54 : 1
  • Kitabatake , M. , Mitsuyu , T. and Wasa , K. 1982 . J. Non-Crst. Solids , 53 : 1
  • Kusao , K. , Wasa , K. and Hayakawa , S. 1968 . Jpn. J. Appl. Phys. , 7 : 437
  • Wasa , K. and Hayakawa , S. 1978 . Thin Solid Films , 52 : 31
  • Feldman , C. 1955 . Rev. Sci. Instr. , 26 : 463
  • Bickley , W. P. and Campbell , D. S. 1962 . Vide , 99 : 214
  • Feuersanger , A. E. 1966 . Bull. Amer. Phys. Soc. , 11 : 35
  • Burton , R. L. , Bartholomew , C. S. , Wild , W. J. and Grieser , J. L. American Institute of Physics Conference Proc. No. 165 . pp. 166 New York : AIP .
  • Glass , A. M. , Lines , M. E. , Nassau , K. and Shiever , J. W. 1977 . Appl. Phys. Lett. , 31 : 249
  • Takashige , M. , Nakamura , T. , Ozawa , H. , Uno , R. , Tsuya , N. and Arai , K. 1980 . Jpn. J. Appl. Phys. , 19 : L255
  • Kitabatake , M. , Mitsuyu , T. and Wasa , K. 1984 . Appl. Phys. Lett. , 56 : 1780
  • Xu , R. , Xu , Y. and Mackenzie , D. Abstract of 1991 MRS Fall Meeting . Boston. pp. 17.7

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