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Original Articles

The use of upstream and downstream information in scheduling semiconductor batch operations

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Pages 1849-1869 | Received 01 Apr 1994, Published online: 03 Apr 2007

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (17)

Durk-Jouke van der Zee. (2015) Family-based dispatching with parallel machines. International Journal of Production Research 53:19, pages 5837-5856.
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Wenyou Jia, Zhibin Jiang & You Li. (2013) Closed loop control-based real-time dispatching heuristic on parallel batch machines with incompatible job families and dynamic arrivals. International Journal of Production Research 51:15, pages 4570-4584.
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Durk-Jouke van der Zee. (2013) Family based dispatching with batch availability. International Journal of Production Research 51:12, pages 3643-3653.
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J.J. Liu, Q.X. Chen, N. Mao & X.D. Chen. (2013) Bi-objective dynamic control of batch processor with non-identical jobs in mould manufacturing. International Journal of Production Research 51:6, pages 1820-1835.
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John Benedict C. Tajan, Appa Iyer Sivakumar & Stanley B. Gershwin. (2012) Heuristic control of multiple batch processors with incompatible job families and future job arrivals. International Journal of Production Research 50:15, pages 4206-4219.
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Subhash C. Sarin, Amrusha Varadarajan & Lixin Wang. (2011) A survey of dispatching rules for operational control in wafer fabrication. Production Planning & Control 22:1, pages 4-24.
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Seok Ho Chang & StanleyB. Gershwin. (2010) Modeling and analysis of two unreliable batch machines with a finite buffer in between. IIE Transactions 42:6, pages 405-421.
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Abdullah Cerekci & Amarnath Banerjee. (2010) Dynamic control of the batch processor in a serial-batch processor system with mean tardiness performance. International Journal of Production Research 48:5, pages 1339-1359.
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Yao-Feng Xue & Hua-Li Sun. (2010) An effective formulation for optimal scheduling of multistage multi-product batch plant based on due dates. International Journal of Production Research 48:3, pages 901-913.
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D. J. Van Der Zee. (2007) Dynamic scheduling of batch-processing machines with non-identical product sizes. International Journal of Production Research 45:10, pages 2327-2349.
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Amit Kumar Gupta & Appa Iyer Sivakumar. (2007) Controlling delivery performance in semiconductor manufacturing using Look Ahead Batching. International Journal of Production Research 45:3, pages 591-613.
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S.J. Mason , J.W. Fowler, W.M. Carlyle & D.C. Montgomery. (2005) Heuristics for minimizing total weighted tardiness in complex job shops. International Journal of Production Research 43:10, pages 1943-1963.
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D. J. Van Der Zee . (2004) Dynamic scheduling of batch servers with compatible product families. International Journal of Production Research 42:22, pages 4803-4826.
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Joonhwan In, Yushin Hong & Chi-Hyuck Jun. (2003) Analysis of a batch machine fed by an unreliable discrete machine . Production Planning & Control 14:7, pages 656-661.
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John W Fowler, Gary L Hogg & Scott J Mason. (2002) Workload control in the semiconductor industry. Production Planning & Control 13:7, pages 568-578.
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D. J. Van Der Zee. (2002) Adaptive scheduling of batch servers in flow shops. International Journal of Production Research 40:12, pages 2811-2833.
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DURK-JOUKE VAN DER ZEE, AART VAN HARTEN & PETER SCHUUR. (2001) On-line scheduling of multi-server batch operations. IIE Transactions 33:7, pages 569-586.
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Articles from other publishers (57)

Wen-Chi Chien, Ywh-Leh Chou & Cheng-Hung Wu. (2023) Stochastic Scheduling for Batch Processes With Downstream Queue Time Constraints. IEEE Transactions on Semiconductor Manufacturing 36:4, pages 599-610.
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John W. Fowler & Lars Mönch. (2022) A survey of scheduling with parallel batch (p-batch) processing. European Journal of Operational Research 298:1, pages 1-24.
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Haibo Wang, Shigang Chen, Md Sami Ul Islam Sami, Fahim Rahman & Mark Tehranipoor. 2021. Emerging Topics in Hardware Security. Emerging Topics in Hardware Security 27 59 .
Pyung-Hoi Koo & Rubén Ruiz. (2020) Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication. Applied Sciences 10:17, pages 5936.
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Yi Tan, Lars Mönch & John W. Fowler. (2017) A hybrid scheduling approach for a two-stage flexible flow shop with batch processing machines. Journal of Scheduling 21:2, pages 209-226.
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Abdullah Çerekçi & Amarnath Banerjee. (2015) Effect of upstream re-sequencing in controlling cycle time performance of batch processors. Computers & Industrial Engineering 88, pages 206-216.
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Yi Tan, Lars Monch & John W. Fowler. (2014) Decomposition heuristic for a two-machine flow shop with batch processing. Decomposition heuristic for a two-machine flow shop with batch processing.
Pyung-Hoi Koo. (2014) A Real-Time Loading Strategy of Batch Processing Machines for Average Tardiness Minimization. Journal of Korean Institute of Industrial Engineers 40:2, pages 215-222.
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Paramitha Mansoer & Pyung-Hoi Koo. (2014) A Batching Strategy for Batch Processing Machine with Multiple Product Types. Journal of Industrial and Intelligent Information 3:2.
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Pyung-Hoi Koo & Dug Hee Moon. (2013) A Review on Control Strategies of Batch Processing Machines in Semiconductor Manufacturing. IFAC Proceedings Volumes 46:9, pages 1690-1695.
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Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 247 266 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 207 246 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 177 205 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 105 175 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 65 104 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 29 64 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 11 28 .
Lars Mönch, John W. Fowler & Scott J. MasonLars Mönch, John W. Fowler & Scott J. Mason. 2013. Production Planning and Control for Semiconductor Wafer Fabrication Facilities. Production Planning and Control for Semiconductor Wafer Fabrication Facilities 1 10 .
Frank S. Yao, Mei Zhao & Hui Zhang. (2012) Two-stage hybrid flow shop scheduling with dynamic job arrivals. Computers & Operations Research 39:7, pages 1701-1712.
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June-Young Bang, Yeong-Dae Kim & Seong-Woo Choi. (2012) Multiproduct Lot Merging–Splitting Algorithms for Semiconductor Wafer Fabrication. IEEE Transactions on Semiconductor Manufacturing 25:2, pages 200-210.
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Jorick Lartigau, Lanshun Nie, Xiaofei Xu, Dechen Zhan & Tehani Mou. (2012) Scheduling Methodology for Production Services in Cloud Manufacturing. Scheduling Methodology for Production Services in Cloud Manufacturing.
Shiqing Yao, Zhibin Jiang & Na Li. (2012) A branch and bound algorithm for minimizing total completion time on a single batch machine with incompatible job families and dynamic arrivals. Computers & Operations Research 39:5, pages 939-951.
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Tehani Mou, Lanshun Nie, Dechen Zhan & Xiaofei Xu. 2012. Enterprise Interoperability V. Enterprise Interoperability V 427 437 .
Lars Mönch, John W. Fowler, Stéphane Dauzère-Pérès, Scott J. Mason & Oliver Rose. (2011) A survey of problems, solution techniques, and future challenges in scheduling semiconductor manufacturing operations. Journal of Scheduling 14:6, pages 583-599.
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John Benedict C. Tajan, Appa Iyer Sivakumar & Stanley B. Gershwin. (2011) Control of a Single Batch Processor With Incompatible Job Families and Future Job Arrivals. IEEE Transactions on Semiconductor Manufacturing 24:2, pages 208-222.
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Yeong-Dae Kim, Jae-Hun Kang, Gyeong-Eun Lee & Seung-Kil Lim. (2011) Scheduling Algorithms for Minimizing Tardiness of Orders at the Burn-in Workstation in a Semiconductor Manufacturing System. IEEE Transactions on Semiconductor Manufacturing 24:1, pages 14-26.
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J F Bard, Yumin Deng, R Chacon & J Stuber. (2010) Midterm Planning to Minimize Deviations From Daily Target Outputs in Semiconductor Manufacturing. IEEE Transactions on Semiconductor Manufacturing 23:3, pages 456-467.
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Jaewoo Chung & Jaejin Jang. (2009) A WIP Balancing Procedure for Throughput Maximization in Semiconductor Fabrication. IEEE Transactions on Semiconductor Manufacturing 22:3, pages 381-390.
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June-Young Bang, Jae-Hun Kang, Bong-Kyun Kim & Yeong-Dae Kim. (2008) Multi-product lot merging/splitting algorithms for a semiconductor wafer fabrication. Multi-product lot merging/splitting algorithms for a semiconductor wafer fabrication.
Stephen Murray, John Geraghty, Paul Young & Steve Sievwright. (2008) Time-Limited Next Arrival heuristic for batch processing and setup reduction in a re-entrant environment. Time-Limited Next Arrival heuristic for batch processing and setup reduction in a re-entrant environment.
John Benedict C. Tajan, Appa Iyer Sivakumar & Stanley B. Gershwin. (2008) Online control of a batch processor with incompatible job families under correlated future arrivals. Online control of a batch processor with incompatible job families under correlated future arrivals.
Myoungsoo Ham & John W. Fowler. (2008) Scheduling of Wet Etch and Furnace Operations with Next Arrival Control Heuristic. The International Journal of Advanced Manufacturing Technology 38:9-10, pages 1006-1017.
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Yeong-Dae Kim, June-Young Bang, Kwee-Yeon An & Seung-Kil Lim. (2008) A Due-Date-Based Algorithm for Lot-Order Assignment in a Semiconductor Wafer Fabrication Facility. IEEE Transactions on Semiconductor Manufacturing 21:2, pages 209-216.
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D. Y. Sha, Sheng-Yuan Hsu & X. D. Lai. (2006) Design of due-date oriented look-ahead batching rule in wafer fabrication. The International Journal of Advanced Manufacturing Technology 35:5-6, pages 596-609.
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Ruey-Shan Guo, David M. Chiang & Fan-Yun Pai. (2006) A WIP-based exception-management model for integrated circuit back-end production processes. The International Journal of Advanced Manufacturing Technology 33:11-12, pages 1263-1274.
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Scott J. Mason, Mary E. Kurz, Michele E. Pfund, John W. Fowler & Letitia M. Pohl. (2007) Multi-Objective Semiconductor Manufacturing Scheduling: A Random Keys Implementation of NSGA-II. Multi-Objective Semiconductor Manufacturing Scheduling: A Random Keys Implementation of NSGA-II.
A.K. Gupta & A.I. Sivakumar. (2006) Optimization of due-date objectives in scheduling semiconductor batch manufacturing. International Journal of Machine Tools and Manufacture 46:12-13, pages 1671-1679.
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Suhua Hsieh & Kai-Chung Hou. (2005) Production-flow-value-based job dispatching method for semiconductor manufacturing. The International Journal of Advanced Manufacturing Technology 30:7-8, pages 727-737.
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M. Mathirajan & A.I. Sivakumar. (2006) A literature review, classification and simple meta-analysis on scheduling of batch processors in semiconductor. The International Journal of Advanced Manufacturing Technology 29:9-10, pages 990-1001.
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Lars Mönch, Jens Zimmermann & Peter Otto. (2006) Machine learning techniques for scheduling jobs with incompatible families and unequal ready times on parallel batch machines. Engineering Applications of Artificial Intelligence 19:3, pages 235-245.
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Myoungsoo Ham, M. Raiford, F. Dillard, W. Risner, M. Knisely, J. Harrington, T. Murtha & HyungTae Park. (2006) Dynamic Wet-Furnace Dispatching/Scheduling in Wafer Fab. Dynamic Wet-Furnace Dispatching/Scheduling in Wafer Fab.
Lars Mönch, Hari Balasubramanian, John W. Fowler & Michele E. Pfund. (2005) Heuristic scheduling of jobs on parallel batch machines with incompatible job families and unequal ready times. Computers & Operations Research 32:11, pages 2731-2750.
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A.K. Gupta, S.A. Iyer & V.K. Ganesan. (2005) Look ahead batching to minimize earliness/tardiness measures in batch processes. Look ahead batching to minimize earliness/tardiness measures in batch processes.
Yih-Yi Lee, C.T. Chen & C. Wu. (2005) Reaction chain of process queue time quality control. Reaction chain of process queue time quality control.
J. G. Dai & O. B. Jennings. (2004) Stabilizing Queueing Networks with Setups. Mathematics of Operations Research 29:4, pages 891-922.
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Yeong-Dae Kim, Sang-Oh Shim, Bum Choi & Hark Hwang. (2003) Simplification methods for accelerating simulation-based real-time scheduling in a semiconductor wafer fabrication facility. IEEE Transactions on Semiconductor Manufacturing 16:2, pages 290-298.
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D.-J. van der Zee. (2003) Look-ahead strategies for controlling batch operations in industry - an overview. Look-ahead strategies for controlling batch operations in industry - an overview.
L. Monch & I. Habenicht. (2003) Simulation-based assessment of batching heuristics in semiconductor manufacturing. Simulation-based assessment of batching heuristics in semiconductor manufacturing.
C.S. Sung, Y.I. Choung, J.M. Hong & Y.H. Kim. (2002) Minimizing makespan on a single burn-in oven with job families and dynamic job arrivals. Computers & Operations Research 29:8, pages 995-1007.
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Nipa Phojanamongkolkij, John W. Fowler & Jeffrey K. Cochran. (2002) Determining operating criterion of batch processing operations for wafer fabrication. Journal of Manufacturing Systems 21:5, pages 363-379.
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Yu-Hsin Lin & Ching-En Lee. (2001) A total standard WIP estimation method for wafer fabrication. European Journal of Operational Research 131:1, pages 78-94.
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Appa Iyer Sivakumar & Chin Soon Chong. (2001) A simulation based analysis of cycle time distribution, and throughput in semiconductor backend manufacturing. Computers in Industry 45:1, pages 59-78.
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D.-J. van der Zee. (2001) Real-time adaptive control of multi-product multi-server bulk service processes. Real-time adaptive control of multi-product multi-server bulk service processes.
Yeong-Dae Kim, Jae-Gon Kim, Bum Choi & Hyung-Un Kim. (2001) Production scheduling in a semiconductor wafer fabrication facility producing multiple product types with distinct due dates. IEEE Transactions on Robotics and Automation 17:5, pages 589-598.
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C.S. Sung & Y.I. Choung. (2000) Minimizing makespan on a single burn-in oven in semiconductor manufacturing. European Journal of Operational Research 120:3, pages 559-574.
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D.-J. van der Zee. (2000) Look-ahead strategies for controlling batch operations in industry-overview, comparison and exploration. Look-ahead strategies for controlling batch operations in industry-overview, comparison and exploration.
Kim Yeong-Dae, Lee Dong-Ho, Kim Jung-Ug & Roh Hwan-Kyun. (1998) A simulation study on lot release control, mask scheduling, and batch scheduling in semiconductor wafer fabrication facilities. Journal of Manufacturing Systems 17:2, pages 107-117.
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