The use of upstream and downstream information in scheduling semiconductor batch operations

References

• AHMADI , J. H. , AHMADI , R. H. , DASU , S. , and TANG , C. S. , 1989 , Batching and scheduling jobs on batch and discrete processors. Working Paper, Operations and Technology Management, Graduate School of Management , University of California at Los Angeles .
   Google Scholar
• BAILEY , N. T. , 1954 , On queueing processes with bulk service. Journal of the Royal Statistical Society B . 16 , 80 – 87 .
   Google Scholar
• CHAUDHRY , M. L. , and TEMPLETON , J. G. C. , 1983 , A First Course in Bulk Queues ( New York Wiley ).
   Google Scholar
• CRABHILL , T. B. , Gkoss , D. , and MAGAZINE , J. , 1977 . A classified bibliography of research on optimal design and control of queues. Operations Research. 25 , 219 – 232 .
   Google Scholar
• FOWLER , J. W. , 1990 , Strategic control of multichannel bulk service diffusion/oxidation processes. PhD thesis , Texas A&M University , College Station also available as SRC Publication T91016 .
   Google Scholar
• FOWLER , J. W. , HOGG , G. L. , and PHILLIPS , D. T. , 1992 , Control of multiproduct bulk service diffusion/oxidation processes. IIE Transactions , 24 , 84 – 96 .
   Web of Science ®Google Scholar
• GLASSEY , C. R. , and RESENDE , M. G. , 1988 , Closed-loop job release control for VLSI circuit manufacturing. IEEE Transactions on Semiconductor Manufacturing , 1 , p36—46 p.
   Google Scholar
• GLASSEY , C. R. , and WENG , W. W. , 1991 , Dynamic batching heuristic for simultaneous processing , IEEE Transactions on Semiconductor Manufacturing , 14 , 77 – 82 .
   Web of Science ®Google Scholar
• GURNANI , H. , ANUPINDI , R. , and AKELLA , R. , 1992 , Control of batch processing systems in semiconductor wafer fabrication facilities. IEEE Transactions of Semiconductor Manufacturing , 5 , 319 – 328 also available in Proceedings of the 1991 IEEE International Conference on Robotics and Automation, Sacramento, CA .
   Web of Science ®Google Scholar
• JACOBE DE HAUT DE SIGY , R. , 1990 , Loading control policy for a batch machine , M.Sc. thesis, Laboratory for Manufacturing and Productivity , Massachusetts Institute of Technology , Cambridge , MA .
   Google Scholar
• LOZINSKI, C, and GLASSEY , C. R. , 1988 . Bottleneck starvation indicators for shop floor control. IEEE Transactions on Semiconductor Manufacturing , 1 , 147 – 153 .
   Google Scholar
• NEUTS , M.F. , 1967 , A general class of bulk queues with poisson input. Annals of Mathematical Statistics , 38 , 759 – 770 .
   Google Scholar
• ROBINSON , J. K. , 1992 . An analysis of the potential impact of control strategies for bulk service queueing systems on semiconductor manufacturing facilities , Msc thesis. The University of Texas , Austin .
   Google Scholar
• WEIN , L. , 1988 , Scheduling semiconductor wafer fabrication. IEEE Transactions on Semiconductor Manufacturing , 1 , p115—130 p.
   Google Scholar
• WENG, W, W., and LEACHMAN , R. C. , 1993 , An improved methodology for real-time production decisions at batch-process work stations. IEEE Transactions on Semiconductor Manufacturing , 6 ( 3 ), 219 – 225 .
   Web of Science ®Google Scholar