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The Journal of Adhesion Volume 79, 2003 - Issue 2
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Original Articles

Particle removal mechanisms in cryogenic surface cleaning

Christopher Toscano Department of Mechanical and Aeronautical Engineering, Clarkson University, Potsdam, New York, USA
&
Goodarz Ahmadi Department of Mechanical and Aeronautical Engineering, Clarkson University, Potsdam, New York, USA
Pages 175-201 | Published online: 08 Sep 2010

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Min-Su Kim, Taesung Kim & Jin-Goo Park. (2015) Removal of Nano-sized Particles Using Carbon Dioxide (CO2) Gas Cluster Cleaning without Pattern Damage. Particulate Science and Technology 33:5, pages 558-561.
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Shuji Matsusaka. (2015) High-Resolution Analysis of Particle Deposition and Resuspension in Turbulent Channel Flow. Aerosol Science and Technology 49:9, pages 739-746.
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Yi-Hung Liu, Hiroyuki Maruyama & Shuji Matsusaka. (2011) Effect of Particle Impact on Surface Cleaning Using Dry Ice Jet. Aerosol Science and Technology 45:12, pages 1519-1527.
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Ivin Varghese, M. D. Murthy Peri, Thomas Dunbar, Brian Maynard, DerekA. Thomas & Cetin Cetinkaya. (2008) Removal of Nanoparticles With Laser Induced Plasma. Journal of Adhesion Science and Technology 22:5-6, pages 651-674.
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M. D. Murthy Peri, VamsiK. Devarapalli & Cetin Cetinkaya. (2007) Selective removal of 10–40-nm particles from silicon wafers using laser-induced plasma shockwaves. Journal of Adhesion Science and Technology 21:3-4, pages 331-337.
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Souvik Banerjee & Andrea Campbell. (2005) Principles and mechanisms of sub-micrometer particle removal by CO2 cryogenic technique. Journal of Adhesion Science and Technology 19:9, pages 739-751.
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Articles from other publishers (32)

Khoi Ngo, N.K. Anand & Yassin Hassan. (2023) Particle deposition model for a fully developed turbulent channel flow. Nuclear Engineering and Design 414, pages 112580.
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Jingyu Cui, Mingjun Li, Weigang Xu, Zhe Lin, Linhang Zhu & Yuzhen Jin. (2023) A numerical analysis of ash fouling characteristics in elliptical tube bundles. Applied Thermal Engineering 235, pages 121436.
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Xinjie Zhang, Shuai Liu, Yude Liu, Hanjie Guo & Wentian Shi. (2023) Titanium Alloy Fabricated by Additive Manufacturing for Medical Applications: Obtaining, Characterization and Application—Review. Metals 13:3, pages 462.
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Shuangcheng Fu, Gang Cao, Guofu Ou, Faqi Zhou & Luyu Li. (2022) Numerical study of fly ash deposition process in low temperature economizer under SCR conditions. Korean Journal of Chemical Engineering 39:7, pages 1717-1728.
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Grzegorz Chomka, Jarosław Chodór, Leon Kukiełka & Maciej Kasperowicz. (2022) The Use of a High-Pressure Water-Ice Jet for Removing Worn Paint Coating in Renovation Process. Materials 15:3, pages 1168.
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Yujin Cho, Hoomi Choi, Sungwon Mo & Taesung Kim. (2020) Removal of nano-sized surface particles by CO2 gas cluster collisions for dry cleaning. Microelectronic Engineering 234, pages 111438.
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Jae Hong Lee, Joonoh Kim, Seungho Kim, Joongha Lee, Jinkyu Kim, Kihoon Choi & Ho-Young Kim. (2019) Removal of Contaminant Nanoparticles with $$\hbox {CO}_2$$ Nanobullets at Atmospheric Conditions. International Journal of Precision Engineering and Manufacturing-Green Technology 7:5, pages 929-938.
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Yunpeng Jiang, Lee Li, Ming Lu, Rumeng Wang, Yiwen Jiang, Shanfeng Liu & Chao Su. (2019) Statistical characteristics and mechanism analysis of adhered particle on surface under strong electric field. Particuology 43, pages 110-122.
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Yongtie Cai, Kunlin Tay, Zhimin Zheng, Wenming Yang, Hui Wang, Guang Zeng, Zhiwang Li, Siah Keng Boon & Prabakaran Subbaiah. (2018) Modeling of ash formation and deposition processes in coal and biomass fired boilers: A comprehensive review. Applied Energy 230, pages 1447-1544.
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Stephan Jantzen, Thomas Decarreaux, Martin Stein, Karin Kniel & Andreas Dietzel. (2018) CO2 snow cleaning of miniaturized parts. Precision Engineering 52, pages 122-129.
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Song-Zhen Tang, Ya-Ling He, Fei-Long Wang & Yu-Bing Tao. (2018) Parametric study on fouling mechanism and heat transfer characteristics of tube bundle heat exchangers for reducing fouling considering the deposition and removal mechanisms. Fuel 211, pages 301-311.
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Jörg Friedrich. 2017. Metal‐Polymer Systems. Metal‐Polymer Systems 173 257 .
Fei-Long Wang, Ya-Ling He, Zi-Xiang Tong & Song-Zhen Tang. (2017) Real-time fouling characteristics of a typical heat exchanger used in the waste heat recovery systems. International Journal of Heat and Mass Transfer 104, pages 774-786.
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Zi-Xiang Tong, Ming-Jia Li, Ya-Ling He & Hou-Zhang Tan. (2017) Simulation of real time particle deposition and removal processes on tubes by coupled numerical method. Applied Energy 185, pages 2181-2193.
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Wenjun Zhou, Ming Liu, Shinian Liu, Mengfei Peng, Jianhui Yu & Chengke Zhou. (2012) On the mechanism of insulator cleaning using dry ice. IEEE Transactions on Dielectrics and Electrical Insulation 19:5, pages 1715-1722.
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Yi-Hung Liu, Daisuke Hirama & Shuji Matsusaka. (2012) Particle removal process during application of impinging dry ice jet. Powder Technology 217, pages 607-613.
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Clemens Otto, Susann Zahn, Felix Rost, Peter Zahn, Doris Jaros & Harald Rohm. (2011) Physical Methods for Cleaning and Disinfection of Surfaces. Food Engineering Reviews 3:3-4, pages 171-188.
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Mohammad Kazemi, Helmuth Treichel & Rito Ligutom. (2011) Substrate cleaning using ultrasonics/megasonics. Substrate cleaning using ultrasonics/megasonics.
H. Getu, J.K. Spelt & M. Papini. (2011) Reduction of particle embedding in solid particle erosion of polymers. Wear 270:11-12, pages 922-928.
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V. A. Andreev, J. M. Prausnitz & C. J. Radke. (2011) Surface collision theory for suspension-based cleaning of particle-contaminated solid substrates. Journal of Applied Physics 109:5.
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V. A. Andreev, E. M. Freer, J. M. de Larios, J. M. Prausnitz & C. J. Radke. (2011) Silicon-Wafer Cleaning with Aqueous Surfactant-Stabilized Gas/Solids Suspensions. Journal of The Electrochemical Society 158:1, pages H55.
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V. A. Andreev, J. M. Prausnitz & C. J. Radke. (2010) Meniscus-Shear Particle Detachment in Foam-Based Cleaning of Silicon Wafers with an Immersion/Withdrawal Cell. Industrial & Engineering Chemistry Research 49:24, pages 12461-12470.
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P Kim & J Seok. (2016) Dynamic Modelling and Simulation of a Cryogenic Carbon Dioxide Cleaning Process. Proceedings of the Institution of Mechanical Engineers, Part E: Journal of Process Mechanical Engineering 224:4, pages 213-221.
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Yi-Hung Liu, Hiroyuki Maruyama & Shuji Matsusaka. (2010) Agglomeration process of dry ice particles produced by expanding liquid carbon dioxide. Advanced Powder Technology 21:6, pages 652-657.
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I. Varghese, Dong Zhou, M.D.M. Peri & C. Cetinkaya. (2009) Onset of Material Alterations Due to Laser-Induced Plasma Exposure in Nanofilms Deposited on Photomasks. IEEE Transactions on Semiconductor Manufacturing 22:4, pages 579-586.
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Sheng-Chung Yang & Yu-Cheng Lin. (2007) Removal of SU-8 photoresist using buckling-driven delamination assisted with a carbon dioxide snow jet for microfluidics fabrication. Journal of Micromechanics and Microengineering 17:12, pages 2447-2453.
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Sheng-Chung Yang, Keng-Shiang Huang & Yu-Cheng Lin. (2007) Optimization of a pulsed carbon dioxide snow jet for cleaning CMOS image sensors by using the Taguchi method. Sensors and Actuators A: Physical 139:1-2, pages 265-271.
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Galit Levitin & Dennis W. Hess. 2007. Handbook for Cleaning/Decontamination of Surfaces. Handbook for Cleaning/Decontamination of Surfaces 539 571 .
Ivin Varghese, M. D. Murthy Peri, Dong Zhou, A. T. John Kadaksham, Thomas J. Dunbar & Cetin Cetinkaya. (2006) Nanoparticle Removal Using Laser Induced Plasma Shockwaves. Nanoparticle Removal Using Laser Induced Plasma Shockwaves.
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D Zhou, A. T. J. Kadaksham, M. D. Murthy Peri, I Varghese & C Cetinkaya. (2006) Nanoparticle Detachment Using Shock Waves. Proceedings of the Institution of Mechanical Engineers, Part N: Journal of Nanoengineering and Nanosystems 219:3, pages 91-102.
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J.W King & L.L Williams. (2003) Utilization of critical fluids in processing semiconductors and their related materials. Current Opinion in Solid State and Materials Science 7:4-5, pages 413-424.
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