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Radiation Effects Volume 71, 1983 - Issue 3-4
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Original Articles

A study of shallow and deep damage in Cu and Al after self-implantation

R. J. Th. Lindgreen Physical Laboratory, Materials Science Centre, University of Groningen, Westersingel 34, 9718 CM, Groningen, The Netherlands
,
D. O. Boerma Physical Laboratory, Materials Science Centre, University of Groningen, Westersingel 34, 9718 CM, Groningen, The Netherlands
&
J. Th. M. De Hosson Department of Applied Physics, Materials Science Centre, University of Groningen, 9747 AG, Groningen, The Netherlands
Pages 289-314 | Received 10 Aug 1982, Published online: 19 Aug 2006

Citations (8)

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Read on this site (1)

G.V. Dedkov. (1984) On the theory of the interatomic interaction potentials at high projectile velocities. Radiation Effects 86:4, pages 127-132.
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Articles from other publishers (7)

G Carter. (1994) Peening in ion-assisted thin-film deposition: a generalized model. Journal of Physics D: Applied Physics 27:5, pages 1046-1055.
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E. Gerritsen, H.A.A. Keetels & H.J. Ligthart. (1989) Depth selective microstructural analysis of ion implanted metals by cross-section transmission electron microscopy and computer simulation. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 39:1-4, pages 614-618.
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Awatar Singh. (1987) Removal processes for damage and contamination after CF4/40%H2 reactive ion etching of silicon. Microelectronics Journal 18:5, pages 13-24.
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H.J. Ligthart, E. Gerritsen, P.J. van Den Kerkhoff, S. Hoekstra, R.E. van De Leest & E. Keetels. (1987) Aluminium implantations in copper. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 19-20, pages 209-212.
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J.A. Sprague, P.R. Malmberg, J.M. Lambert, P.A. Treado, G.W. Reynolds, G.P. Mueller, M. Rosen & A. Vincenz. (1987) Effect of crystal orientation on sputtering and lattice damage in ion-irradiated copper. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 19-20, pages 75-79.
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M. Vos & D.O. Boerma. (1986) Lattice damage in single crystals of Cu after self-implantation studied by channeling. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 15:1-6, pages 337-340.
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F. Pleiter & K. G. Prasad. (1984) Lattice defects in ion-implanted aluminium studied by means of perturbed angular correlations. Hyperfine Interactions 20:4, pages 221-248.
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