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Surface Engineering Volume 36, 2020 - Issue 1: Special Issue: Thin Films
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Research Articles

Comparative study on structure and properties of ZnO thin films prepared by RF magnetron sputtering using pure metallic Zn target and ZnO ceramic target

Wei YeSchool of Mechanical Engineering, Shaanxi University of Technology, Hanzhong, People’s Republic of ChinaCorrespondence[email protected]
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Kun FangPrecision Electrical and Mechanical Division, Horological Research Institute of Light Industry, Xi’an, People’s Republic of ChinaView further author information
Pages 49-54 | Received 18 Jun 2018, Accepted 29 Nov 2018, Published online: 10 Dec 2018

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Read on this site (3)

Cemre Avşar & Gurkan Karakas. (2023) Vanadium promoted ZnO films: effects on optical and photocatalytic properties. Surface Engineering 39:7-12, pages 852-859.
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Mahdi Kadkhodaee, Amir Abdollah-zadeh, Hamid Assadi & Rajab Ali Seraj. (2022) Cold-spray manufacturing of Zn/ZnO nanocomposite targets for ZnO sputtering. Surface Engineering 38:5, pages 465-471.
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Mei Xin. (2021) Growth temperature on ZnO:Al thin films morphology and optical properties. Surface Engineering 37:11, pages 1476-1483.
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Articles from other publishers (3)

Mohammad-Reza Zamani-Meymian, Razieh Keshtmand, Marzieh Yazdanshenas & Milad Fallah. (2024) Investigating the simultaneous effect of bias voltage and annealing on structural and optical properties of ZnO layer prepared by RF magnetron sputtering. Results in Optics 14, pages 100609.
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H. Krysova, V. Mansfeldova, H. Tarabkova, A. Pisarikova, Z. Hubicka & L. Kavan. (2024) High-quality dense ZnO thin films: work function and photo/electrochemical properties. Journal of Solid State Electrochemistry.
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Chan-ho Park, Yo Han Kim, Hyeongwon Jeong, Bo-Ram Won, Hyejin Jeon & Jae-ha Myung. (2023) Development of robust YSZ thin-film electrolyte by RF sputtering and anode support design for stable IT-SOFC. Ceramics International 49:20, pages 32953-32961.
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