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Original Articles

Particulate Contamination and Microelectronics Manufacturing: An Introduction

Douglas W. Cooper IBM Thomas J. Watson Research Center, Yorktown Heights, NY, 10598
Pages 287-299 | Published online: 06 Jun 2007

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Cunteng Wang, Haolun Xu, Ka Chung Chan, Christopher Y. H. Chao & Sau Chung Fu. (2022) Particle deposition at patterned bend regions as a supplementary air cleaning technique in ventilation ducting systems. Aerosol Science and Technology 56:10, pages 959-971.
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G.H. Bagheri, M. Salmanzadeh, V. Golkarfard & G. Ahmadi. (2012) Simulation of Solid Particles Behavior in a Heated Cavity at High Rayleigh Numbers. Aerosol Science and Technology 46:12, pages 1382-1391.
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Abouzar Moshfegh, Mousa Farhadi & Mehrzad Shams. (2010) Numerical Simulation of Particle Dispersion and Deposition in Channel Flow Over Two Square Cylinders in Tandem. Journal of Dispersion Science and Technology 31:6, pages 852-859.
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Z. F. Tian, J. Y. Tu & G. H. Yeoh. (2007) CFD Studies of Indoor Airflow and Contaminant Particle Transportation. Particulate Science and Technology 25:6, pages 555-570.
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DanielJ. Rader, AnthonyS. Geller & SeungJ. Choi. (2002) Particle Deposition in Parallel-Plate Reactors: Simultaneous Diffusion and External Forces. Aerosol Science and Technology 36:3, pages 251-266.
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ROBERT A. GOVERNAL$suffix/text()$suffix/text(). (1998) EXPERIENCE WITH AND THEORETICAL MODELLING OF PARTICLE DISTRIBUTIONS FROM A CLASS 10,000 CLEANROOM. Particulate Science and Technology 16:4, pages 281-293.
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DanielJ. Rader & AnthonyS. Geller. (1998) Showerhead-Enhanced Inertial Particle Deposition in Parallel-Plate Reactors. Aerosol Science and Technology 28:2, pages 105-132.
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G. W. GALE, A. A. BUSNAINA & M. R. ZAAZHOA. (1998) A VISUALIZATION TECHNIQUE FOR SURFACE FLOWS. Chemical Engineering Communications 165:1, pages 167-176.
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T.L. Thatcher & W.W. Nazaroff. (1997) Effect of Small-Scale Obstructions and Surface Textures on Particle Deposition from Natural Convection Flow. Aerosol Science and Technology 27:6, pages 709-725.
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TracyL. Thatcher, WendyA. Fairchild & WilliamW. Nazaroff. (1996) Particle Deposition from Natural Convection Enclosure Flow Onto Smooth Surfaces. Aerosol Science and Technology 25:4, pages 359-374.
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Amy Li, Goodarz Ahmadi, MichaelA. Gaynes & RaymondG. Bayer. (1995) Aerosol Particle Deposition in a Recirculation Region. The Journal of Adhesion 51:1-4, pages 87-103.
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Fa-Gung Fan & Goodarz Ahmadi. (1994) On the Sublayer Model for Turbulent Deposition of Aerosol Particles in the Presence of Gravity and Electric Fields. Aerosol Science and Technology 21:1, pages 49-71.
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Amy Li & Goodarz Ahmadi. (1993) Computer Simulation of Deposition of Aerosols in a Turbulent Channel Flow with Rough Walls. Aerosol Science and Technology 18:1, pages 11-24.
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SALEM ABUZEID, AHMEDA. BUSNAINA & GOODARZ AHMADI. (1992) WALL DEPOSITION OF SMALL SUSPENDED PARTICLES IN A TURBULENT CHANNEL FLOW. Particulate Science and Technology 10:3-4, pages 209-225.
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K.W. Lee, L.A. Curtis, J.J. Chahine & F. Yaghmaie. (1992) Behavior of Small Particles from Process Gas Streams in Diffusion Furnaces. Aerosol Science and Technology 16:4, pages 236-245.
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Amy Li & Goodarz Ahmadi. (1992) Dispersion and Deposition of Spherical Particles from Point Sources in a Turbulent Channel Flow. Aerosol Science and Technology 16:4, pages 209-226.
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DOUGLASW. COOPER, ROBERTJ. MILLER, JIN JWANG WU & MICHAELH. PETERS. (1990) DEPOSITION OF SUBMICRON AEROSOL PARTICLES DURING INTEGRATED CIRCUIT MANUFACTURING: THEORY. Particulate Science and Technology 8:3-4, pages 209-224.
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SALEM ABUZEID, AHMEDA. BUSNAINA & GOODARZ AHMADI. (1990) EULERIAN AND LAGRANGIAN SIMULATIONS OF PARTICLE DEPOSITION FROM A POINT SOURCE IN A TURBULENT CHANNEL FLOW. Particulate Science and Technology 8:3-4, pages 145-166.
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Hadj Ounis & Goodarz Ahmadi. (1990) A Comparison of Brownian and Turbulent Diffusion. Aerosol Science and Technology 13:1, pages 47-53.
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Yi Tian, Pratim Biswas, SotirisE. Pratsinis & Jin Jwang Wu. (1990) Receptor Modeling for Contaminant Particle Source Apportionment in Clean Rooms. Aerosol Science and Technology 12:4, pages 805-812.
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D.W. Cooper & H.L. Wolfe. (1990) Electrostatic Removal of Particle Singlets and Doublets from Conductive Surfaces. Aerosol Science and Technology 12:3, pages 508-517.
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DouglasW. Cooper, MichaelH. Peters & RobertJ. Miller. (1989) Predicted Deposition of Submicrometer Particles Due to Diffusion and Electrostatics in Viscous Axisymmetric Stagnation-Point Flow. Aerosol Science and Technology 11:2, pages 133-143.
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DOUGLASW. COOPER. (1988) MONITORING CONTAMINANT PARTICLES IN GASES: A REVIEW. Particulate Science and Technology 6:2, pages 219-242.
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Benjamin Y. H. Liu & Kang-ho Ahn. (1987) Particle Deposition on Semiconductor Wafers. Aerosol Science and Technology 6:3, pages 215-224.
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