42
Views
22
CrossRef citations to date
0
Altmetric
Original Articles

The role of sputtering and displacement damage in the electron SCRIBE process

&
Pages 133-141 | Received 03 Apr 1991, Accepted 07 Jun 1991, Published online: 20 Aug 2006

Keep up to date with the latest research on this topic with citation updates for this article.

Read on this site (4)

K. A. Mkhoyan, J. Silcox, M. A. Mcguire & F. J. Disalvo. (2006) Radiolytic purification of CaO by electron beams. Philosophical Magazine 86:19, pages 2907-2917.
Read now
H. Li, H. P. Sun, F. Shen & Z. Zhang. (2002) A new modulated structure in GaN nanoparticles. Philosophical Magazine Letters 82:2, pages 91-98.
Read now
DavidA. Muller & John Silcox. (1995) Radiation damage of Ni3Al by 100 keV electrons. Philosophical Magazine A 71:6, pages 1375-1387.
Read now

Articles from other publishers (18)

Alexander Storm, Janis Köster, Mahdi Ghorbani-Asl, Silvan Kretschmer, Tatiana E. Gorelik, Michael Kiarie Kinyanjui, Arkady V. Krasheninnikov & Ute Kaiser. (2023) Electron-Beam- and Thermal-Annealing-Induced Structural Transformations in Few-Layer MnPS 3 . ACS Nano 17:5, pages 4250-4260.
Crossref
Ke Shi, Long Wang, Wei Zhang, Haibo Chen, Zhien Ning, Jiali Liao, Yuanyou Yang, Ning Liu & Jijun Yang. (2020) Different Fe(Al) transition coatings on the performance of Al2O3 coating. Fusion Engineering and Design 160, pages 111835.
Crossref
Long Wang, Ling Dan Zhang, Jia Heng Wang, Yong Jin Feng, Kai Ming Feng, Ji Jun Yang, Jia Li Liao, Yuan You Yang & Ning Liu. (2017) The effect of electron irradiation and post-irradiation annealing on α -Al 2 O 3 coating prepared by MOD method. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 406, pages 600-605.
Crossref
Suji Choi, Jong Hoon Lee, Min Wook Pin, Dong Won Jang, Seong-Gu Hong, Boklae Cho, Sang Jun Lee, Jong Seok Jeong, Seong-Hoon Yi & Young Heon Kim. (2017) Study on fracture behavior of individual InAs nanowires using an electron-beam-drilled notch. RSC Advances 7:27, pages 16655-16661.
Crossref
Xiaochen Huang, Yi Feng, Gang Qian, Yang Wang & Xuebin Zhang. (2016) Effect of electron irradiation on different crystal planes of titanium aluminum carbide. Ceramics International 42:13, pages 14984-14991.
Crossref
Weronika WalkoszWeronika Walkosz. 2011. Atomic Scale Characterization and First-Principles Studies of Si₃N₄ Interfaces. Atomic Scale Characterization and First-Principles Studies of Si₃N₄ Interfaces 23 43 .
N. Jiang. 2010. Advances in Materials Science for Environmental and Nuclear Technology. Advances in Materials Science for Environmental and Nuclear Technology 127 132 .
R.F. Egerton, R. McLeod, F. Wang & M. Malac. (2010) Basic questions related to electron-induced sputtering in the TEM. Ultramicroscopy 110:8, pages 991-997.
Crossref
Nan Jiang & John C. H. Spence. (2009) Radiation damage in zircon by high-energy electron beams. Journal of Applied Physics 105:12.
Crossref
Shiahn J. Chen, David G. Howitt, Brian C. Gierhart, Rosemary L. Smith & Scott D. Collins. (2009) The Applications of In Situ Electron Energy Loss Spectroscopy to the Study of Electron Beam Nanofabrication . Microscopy and Microanalysis 15:3, pages 204-212.
Crossref
David A. Muller. (2009) Structure and bonding at the atomic scale by scanning transmission electron microscopy. Nature Materials 8:4, pages 263-270.
Crossref
D. G. Howitt, S. J. Chen, B. C. Gierhart, R. L. Smith & S. D. Collins. (2008) The electron beam hole drilling of silicon nitride thin films. Journal of Applied Physics 103:2.
Crossref
K. A. Mkhoyan & J. Silcox. (2003) Electron-beam-induced damage in wurtzite InN. Applied Physics Letters 82:6, pages 859-861.
Crossref
T.J. Eustis & J. Silcox. (2020) Electron Beam Induced Damage of GaN And Changes in EELS. Microscopy and Microanalysis 5:S2, pages 642-643.
Crossref
D.A. Muller, S. Subramanian, P.E. Batson, J. Silcox & S.L. Sass. (1996) Structure, chemistry and bonding at grain boundaries in Ni3Al—I. The role of boron in ductilizing grain boundaries. Acta Materialia 44:4, pages 1637-1645.
Crossref
David A. Muller & John Silcox. (2020) Electron beam damage of Ni 3 Al . Proceedings, annual meeting, Electron Microscopy Society of America 51, pages 626-627.
Crossref
D.A. Muller, P.E. Batson, S. Subramanian, S. L. Sass & J. Silcox. (2011) Experimental Measurement of the Local Electronic Structure of Grain Boundaries in Ni 3 Al . MRS Proceedings 319.
Crossref
D.L. Medlin, W.M. Stobbs, J.D. Weinberg, J.E. Angelo, M.S. Daw & M.J. Mills. (2011) Migration Dynamics of a Σ=3 {112} Boundary in Aluminum. MRS Proceedings 319.
Crossref

Reprints and Corporate Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

To request a reprint or corporate permissions for this article, please click on the relevant link below:

Academic Permissions

Please note: Selecting permissions does not provide access to the full text of the article, please see our help page How do I view content?

Obtain permissions instantly via Rightslink by clicking on the button below:

If you are unable to obtain permissions via Rightslink, please complete and submit this Permissions form. For more information, please visit our Permissions help page.