The role of sputtering and displacement damage in the electron SCRIBE process

References

• Berger , S. D. , Salisbury , I. G. , Milne , R. H. , Imeson , D. and Humphreys , C. J. 1987 . Phil. Mag. , B55 ( 3 ) : 341
   Google Scholar
• Bourret , A. 1971 . Phys. Stat. Sol. , 4 ( 2 ) : 813 (a)
   Google Scholar
• Bradley , C. R. 1988 . Calculations of Atomic Sputtering and Displacement Cross-Sections in Solid Elements by Electrons with Energies from Threshold to 1·5 , MV, Argonne National Laboratory . Report ANL-88–48
   Google Scholar
• Bullough , T. J. , Devenish , R. W. and Humphreys , C. J. 1990 . EMAG-MICRO 89, Institute of Physics Conference Series 98 , Edited by: Goodhew , P. J. and Elder , H. Y. 267 Bristol: Institute of Physics .
   Google Scholar
• Cherns , D. , Minter , F. J. and Nelson , R. S. 1975 . Fundamental Aspects of Radiation Damage in Metals , Edited by: Robinson , M. T. 178 Springfield, VA: NTIS . CONF-751006-P1
   Google Scholar
• Cherns , D. , Finnis , M. W. and Matthews , M. D. 1977 . Phil. Mag. , 35 ( 3 ) : 693
   Google Scholar
• Lide , D. R. , ed. 1990 . 9 – 95 . Boca Raton: CRC Press . C.R.C. Handbook of chemistry and Physics, 71st edition
   Google Scholar
• Hohenstein , M. , Seeger , A. and Sigle , W. 1989 . J. nucl. Mater. , 169 : 178
   Google Scholar
• Hollenbeck , J. L. and Buchanan , R. C. 1986 . Materials Research Society Proceedings , 72 : 289
   Google Scholar
• Humphreys , C. J. , Salisbury , I. G. , Berger , S. D. , Timsit , R. S. and Mochel , M. E. 1985 . EMAG 85, Institute of Physics Conference Series no. 78 , Edited by: Tatlock , G. J. 1 Bristol: Adam Hilger .
   Google Scholar
• Kenik , E. A. and Mitchell , T. E. 1976 1978 . “ communication to J. Gittus ” . In Irradiation Effects in Crystalline Solids , 23 London: Applied Science Publishers .
   Google Scholar
• Kratschmer , E. and Isaacson , M. 1977 . J. Vacuum Sci. Technol. , B5 ( 1 ) : 369
   Google Scholar
• Macaulay , J. M. and Berger , S. D. 1987 . Microelectron. Engng , 6 : 527
   Google Scholar
• Oen , O. S. 1973 . Cross-Sections for Atomic Displacements in Solids by Fast Electrons , Oak Ridge National Laboratory Report TM-4897
   Google Scholar
• Stark , J. P. 1976 . Solid State Diffusion , 92 New York: Wiley .
   Google Scholar
• Urban , K. 1974 . High Voltage Electron Microscopy: Proceedings of the Third International Conference , Edited by: Swann , P. R. , Humphreys , C. J. and Goringe , M. J. 356 London: Academic Press .
   Google Scholar
• Wolfenden , A. 1972 . Radiation Effects , 14 : 225
   Google Scholar